Agilent
PD 03 Helium Leak Detector
What it is
The Agilent PD 03 is a portable dry helium leak detector manufactured by Agilent Technologies (originally developed as the Varian PD 03).[2]
The PD 03 is a helium mass spectrometer leak detector designed to locate and measure very small leaks in enclosed systems or devices.[2]
The instrument uses an oil-free scroll/diaphragm combination pump with a pumping speed of 3 m³/h.[2]
A variant of the PD 03, carrying Agilent part number G8610B, includes an internal oil-free IDP-3 dry scroll vacuum pump with a pumping speed of 3.6 m³/h.[3]
How it works
The instrument features a large color touch screen with 180° rotation and an intuitive interface that provides six pre-programmed application setups: Sniffing, Spray Method, High Sensitivity, Auto Sequencer, PPM Testing, and Split Flow.[2]
The PD 03 achieves a minimum detectable leak rate of ≤ 5·10⁻¹² mbar·l/s in vacuum mode and has a helium pumping speed of 1.8 l/s.[2]
The unit includes a built-in turbo primary pump, RS232 and analog interfaces as standard, and optional discrete I/O and a wireless handheld remote with a 100-meter range.[2]
Where it fits in the process flow
In semiconductor manufacturing, the PD 03 is used to verify the integrity of vacuum systems in process tools, gas panels, and gas transfer lines, ensuring that leaks do not compromise process quality or safety.[2]
Applications
The PD 03 is applied in semiconductor production, scientific research, electron microscopes, experimental chambers, surface analytical systems, space chambers, power generation condensers, heat exchangers, steam circuits, automotive components, electrical and refrigeration systems, hermetic packaging, medical implantable devices, and industrial process tools such as vacuum furnaces, electron beam welding, and coating systems.[2]
What do the numbers mean?
Power & electrical1
Vacuum & pumping8
Control & software2
Dimensions & facilities1
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| HLD PD03 | — | — | Portable dry leak detection unit with built-in application setups, touch screen interface, and oil-free scroll/diaphragm pump combination. | heliumleakdetection.net[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationRefurbished in 2019, replaced an oil fore pump with a Teflon scroll pump[1]
- ConfigurationThe turbo to achieve high vacuum fails, needs replacing[1]
- Primary pump typeDry scroll pump[2]
- Pumping speed3 m³/hr[2]
- Pumping speed3.6 m³/h (3 CFM)[3]
- Minimum detectable leak rate≤ 5·10⁻¹² mbar·l/s[2]
- Maximum inlet pressure13 mbar[2]
- Helium pumping speed1.8 l/s[2]
- Operating voltage100-120 or 200-230 V, 50/60 Hz[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the minimum detectable leak rate of the Agilent PD 03?
The minimum detectable leak rate is ≤ 5·10⁻¹² mbar·l/s in vacuum mode.[2]
What type of vacuum pump does the PD 03 use?
The PD 03 uses an oil-free scroll/diaphragm combination pump as standard; the G8610B variant uses an oil-free IDP-3 dry scroll vacuum pump.[2][3]
What is the pumping speed of the PD 03?
The standard PD 03 has a pumping speed of 3 m³/h; the G8610B variant has a pumping speed of 3.6 m³/h.[2][3]
What are the primary test methods available on the PD 03?
The PD 03 includes six pre-programmed application setups: Sniffing, Spray Method, High Sensitivity, Auto Sequencer, PPM Testing, and Split Flow.[2]
Not publicly documented
The following facts about the PD 03 Helium Leak Detector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PD 03 Helium Leak Detector are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PD 03 Helium Leak Detector are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PD 03 Helium Leak Detector are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PD 03 Helium Leak Detector is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PD 03 Helium Leak Detector are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]heliumleakdetection.net — heliumleakdetection.netheliumleakdetection.net
- [3]idealvac.com — idealvac.comidealvac.com
Last updated Sep 27, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
