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Aixtron

AIX 2600 G 3 MOCVD

DepositionAixtron AIX 2600 G 3 MOCVD family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Aixtron AIX 2600 G 3 MOCVD is a metal organic chemical vapor deposition reactor. The Aixtron AIX 2600 G 3 MOCVD handles 2, 3, and 4 inch wafers. The Aixtron AIX 2600 G 3 MOCVD supports 8 wafers per run.[1][2]

AixtronAIX 2600 G 3 MOCVD
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What it is

The Aixtron AIX 2600 G 3 is an MOCVD deposition system.[2][1]

How it works

General reference — not yet source-verified

A metal organic chemical vapor deposition reactor forms thin films by delivering gaseous precursor compounds into a heated reaction zone where they decompose and react at the wafer surface.

Where it fits in the process flow

General reference — not yet source-verified

A metal organic chemical vapor deposition reactor belongs in the thin-film deposition portion of semiconductor fabrication.

Applications

The Aixtron AIX 2600 G 3 can be configured for GaAs or InP substrates.[1]

What do the numbers mean?

Wafer handling3

Wafer sizes
2, 3, and 4 inch[1]
Accurate?
Wafer capacity
8 wafers per run[1]
Accurate?
Substrate materials
GaAs or InP[1]
Accurate?

Configuration & options5

12*4"[3]
Accurate?
OEM
Aixtron[3]
Accurate?
Model
AIX 2600 G 3[3]
Accurate?
Equipment type
MOCVD reactor[1]
Accurate?
Hydride / metal-organic configuration
7 hydrides and 8 metal-organics; or 9 hydrides and 9 metal-organics[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Aixtron AIX 2600 G 3 handle?

The Aixtron AIX 2600 G 3 handles wafer sizes of 2, 3, and 4 inches.[1]

How many wafers can the Aixtron AIX 2600 G 3 process per run?

The Aixtron AIX 2600 G 3 supports 8 wafers per run.[1]

What substrate materials are supported by the Aixtron AIX 2600 G 3?

The Aixtron AIX 2600 G 3 can be configured for GaAs or InP substrates.[1]

What source configurations are available for the Aixtron AIX 2600 G 3?

The Aixtron AIX 2600 G 3 can be configured with either 7 hydrides and 8 metal-organics or 9 hydrides and 9 metal-organics.[1]

What is the model designation of this equipment?

The model designation is AIX 2600 G 3.[2]

Not publicly documented

The following facts about the AIX 2600 G 3 MOCVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AIX 2600 G 3 MOCVD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AIX 2600 G 3 MOCVD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AIX 2600 G 3 MOCVD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AIX 2600 G 3 MOCVD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AIX 2600 G 3 MOCVD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]AIX 2600 G 3 MOCVD — Aixtron | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]inventory listing
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Last updated Oct 8, 2026.

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