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Applied Materials

Centura 5200 HTF EPI

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

General reference — not yet source-verified

The Centura family is a semiconductor process platform used for thin-film deposition tasks in fabrication lines. The EPI designation identifies the machine as an epitaxial deposition tool.

How it works

General reference — not yet source-verified

Epitaxial deposition forms a crystalline silicon layer on a prepared silicon substrate. The process is used when the deposited layer must follow the crystal orientation of the underlying wafer.

The tool operates as a deposition system rather than a patterning or metrology tool. The machine supports epitaxial silicon growth on wafers in a controlled process chamber environment.

Where it fits in the process flow

General reference — not yet source-verified

The Applied Materials Centura 5200 HTF EPI sits in the front-end fabrication flow at the wafer surface preparation and film-growth stage. The machine is used before later patterning, etching, and metallization steps.

The tool produces an epitaxial silicon layer that can serve as a base for subsequent device fabrication steps. The deposited layer is part of the wafer structure used in downstream transistor and integrated-circuit processing.

What do the numbers mean?

Wafer handling2

Wafer Size
8 inch (200 mm)[3]
Accurate?
Wafer size
8 inch[1]
Accurate?

Configuration & options6

RP[1]
Accurate?
ATM[2]
Accurate?
Process
Epitaxial Silicon Deposition[1]
Accurate?
Vintage
2004-01-06[3]
Accurate?
OEM
Applied Materials[1]
Accurate?
Model
Centura 5200 HTF[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Applied Materials Centura 5200 HTF EPI———Equipment inventory listing[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the full model name of this system?

The model is the Applied Materials Centura 5200 HTF EPI.[1][2][3]

Not publicly documented

The following facts about the Centura 5200 HTF EPI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 HTF EPI are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura 5200 HTF EPI are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura 5200 HTF EPI are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura 5200 HTF EPI is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Centura 5200 HTF EPI are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Oct 10, 2026.

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