Applied Materials
UVision 3
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Produced
2007–
Optics
20 nm[1]
How it works
The UVision 3 operates by scanning a wafer with multiple deep ultraviolet laser beams. The system triples the number of laser beams compared to earlier versions, which enables a throughput increase. A photo-multiplier tube (PMT) detects the light scattered or reflected from the wafer surface, capturing signals that indicate the presence of defects.[1]
What do the numbers mean?
Wafer handling1
Optics & imaging3
Performance1
Configuration & options1
Vintage & configurations
- 2007-11-26Introduction[1]
Unveiled on November 26, 2007 as the industry's highest productivity DUV brightfield wafer inspection tool.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the throughput of the UVision 3 compared to other brightfield inspection tools?
The UVision 3 delivers 40% faster throughput than any competitive brightfield inspection tool.[1]
What defect detection sensitivity does the UVision 3 offer?
The UVision 3 offers 20nm sensitivity needed for advanced immersion lithography.[1]
What technology is used in the UVision 3 for illumination?
The UVision 3 uses a multi-beam DUV (deep ultraviolet) laser architecture.[1]
Does the UVision 3 support immersion lithography processes?
Yes, the UVision 3 addresses the contrast versatility required for immersion lithography with new brightfield imaging modes.[1]
What is the target application for the UVision 3 in terms of technology node?
The UVision 3 is designed for 45nm and below double patterning and advanced FEOL applications.[1]
Not publicly documented
The following facts about the UVision 3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the UVision 3 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UVision 3 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the UVision 3 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the UVision 3 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UVision 3 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]nanotech-now.com — nanotech-now.comnanotech-now.com
- [2]Equipment inventory listing
Last updated Sep 22, 2026.