ASM

Epsilon E 2000 Plus

ASM Epsilon family

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Epsilon E 2000 Plus — Inventory photo — Fig. 01Epsilon E 2000 PlusInventory photo^[1]

Gas delivery

H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS^[1]

Optics

H2, HCL for RIKEN KEIKI^[1]

What it is

The ASM Epsilon E 2000 Plus is a chemical vapor deposition reactor designed for reduced pressure and silicon-germanium epitaxial processes. The system handles 4-inch wafers and includes a load lock RP option. The gas delivery system supplies H2, N2, SiH4, HCl, B2H6, PH3, GeH4, and DCS. Mass flow controllers are Horiba STEC Z500 series. A leak detector for H2 and HCl from RIKEN KEIKI is included. The system also incorporates a side car with H2, N2, and HCl Purefire, and a Veeco LOREX 15slm model.^[1]^[2]

What do the numbers mean?

Wafer handling3

Load Lock RP Option^[1]
Wafer Sizes: 4 inch^[1]; RP & SiGe - Load Lock RP Option^[1]

Gas & chemistry3

GAS: H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS^[1]
MFC: Horiba STEC Z500 series^[1]
Gases: H2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS^[1]

Optics & imaging1

Leak Detector: H2, HCL for RIKEN KEIKI^[1]

Configuration & options4

RP & SiGe^[1]
SIDE CAR: H2, N2, HCL Purefire^[1]
Special: Veeco LOREX 15slm model included^[1]
Vintage: 2011^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

GASH2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS^[1]
MFCHoriba STEC Z500 series^[1]
GasesH2, N2, SiH4, HCL, B2H6, PH3, GeH4, DCS^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What gases are supplied by the gas delivery system?

The gas delivery system supplies H2, N2, SiH4, HCl, B2H6, PH3, GeH4, and DCS.^[1]^[2]

What type of mass flow controllers are used?

The system uses Horiba STEC Z500 series mass flow controllers.^[1]^[2]

What leak detector is included?

A leak detector for H2 and HCl from RIKEN KEIKI is included.^[1]^[2]

What is the side car configuration?

The side car supplies H2, N2, and HCl Purefire.^[1]^[2]

Not publicly documented

The following facts about the Epsilon E 2000 Plus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Epsilon E 2000 Plus are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Epsilon E 2000 Plus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Epsilon E 2000 Plus are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Epsilon E 2000 Plus are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Epsilon E 2000 Plus is not on record.
Answerable by: an OEM datasheet or a fab qualification report