Waferpedia

Axcelis

Fusion 200

Axcelis Fusion 200 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

AxcelisFusion 200
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What it is

The Axcelis Fusion 200 is a UV bake system designed for processing 200 mm wafers.[1][2]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • The system is not currently operational due to robot parameters needing re-teaching.

What do the numbers mean?

Power & electrical1

Irradiator
4.3 KW[2]
Accurate?

Wafer handling2

Loading
200 mm open cassette loading[2]
Accurate?
Robot type
2-d robot type[2]
Accurate?

Configuration & options7

Manufacturer
Axcelis[1]
Accurate?
Model
Fusion 200[1]
Accurate?
Description
UV Bake[2]
Accurate?
Version
200 mm[2]
Accurate?
Has CE mark
Yes[2]
Accurate?
Power
380 / 220 VAC[2]
Accurate?
Through the wall type[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
200 PCU-P—2000Described as a UV bake version with 200 mm vintage.fabsurplus.com[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Irradiator4.3 KW[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Fusion 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Fusion 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Fusion 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Fusion 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Fusion 200 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the Fusion 200 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Sep 28, 2026.

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