Waferpedia

Blue M

IGF 77806 MP

Thermal / DiffusionBlue M IGF family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Blue M IGF 77806 MP is an oven used for silicon heat treat. The Blue M IGF 77806 MP belongs to the Blue M IGF family of thermal processing equipment. The Blue M IGF 77806 MP is classified under the Thermal / Diffusion category.[1][2]

IGF 77806 MP — Inventory photo
Fig. 01IGF 77806 MPInventory photo[1]

What it is

The Blue M IGF 77806 MP is classified as a Thermal / Diffusion oven. The unit is designed for silicon heat treat applications.[1][2]

How it works

General reference — not yet source-verified

Thermal diffusion ovens create a uniform temperature environment inside a well-insulated chamber. The workpiece is heated to the target temperature, often under a controlled gas ambient, to enable dopant diffusion or film growth. The Blue M IGF 77806 MP operates on the same principle, using resistive heating elements and a control system to maintain setpoint conditions.

Where it fits in the process flow

General reference — not yet source-verified

In a semiconductor fab, thermal diffusion ovens are positioned after photolithography and etch steps for doping, oxidation, or annealing. The Blue M IGF 77806 MP is used to process wafers in batches, providing the thermal budget required for junction formation or layer growth. Downstream steps include metrology and further deposition or patterning.

What do the numbers mean?

Configuration & options1

Silicon Heat Treat[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the IGF 77806 MP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the IGF 77806 MP are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IGF 77806 MP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IGF 77806 MP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IGF 77806 MP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IGF 77806 MP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]IGF 77806 MP — Blue M | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 10, 2026.

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