CEE
Spin
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The CEE Spin is a photoresist spinner. The CEE Spin applies coatings to substrates up to 200mm round or 7 in. square. The CEE Spin spins at speeds up to 6000 rpm.[1]
What it is
The CEE Spin Coater supports coating substrates up to 200 mm round or 7 in. square.[1]
How it works
Applications
The CEE Spin Coater is used for photoresist coating.[1]
The CEE Spin Coater is used for substrate coating in semiconductor device processing.[1]
What do the numbers mean?
Wafer handling1
Gas & chemistry2
Performance2
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum substrate size for a CEE spin coater?
CEE spin coaters can apply coatings to substrates up to 200 mm round or 7 in. square.[1]
What spin speeds can a CEE spin coater achieve?
CEE spin coaters can spin at speeds up to 6000 rpm.[1]
How many dispense nozzles can be mounted in a CEE spin coater lid?
All CEE spin coaters utilize a standard multi-nozzle dispense center hub that allows up to five dispense nozzles to be mounted simultaneously.[3]
Not publicly documented
The following facts about the Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Spin are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
- [2]Inventory photo
- [3]CEE APOGEE SPIN COATER OWNER'S MANUAL Pdf Download | ManualsLib — manualslib.commanualslib.com
Last updated Oct 7, 2026.