CHA
Mark 50 Vacuum
The CHA Mark 50 Vacuum is a vacuum evaporator. The CHA Mark 50 Vacuum is categorized as Deposition. The CHA Mark 50 Vacuum is specified with 3 phase, 208 VAC, 60 Hz, and 175 amps.[1][2][3]
What it is
How it works
Where it fits in the process flow
Applications
General reference — not yet source-verifiedVacuum evaporation is used to deposit thin films for semiconductor and related microfabrication work.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the CHA Mark 50 Vacuum?
The CHA Mark 50 Vacuum is a vacuum evaporator.[2]
What make and model are given for the machine?
The make is CHA and the model is Mark 50.[2]
Not publicly documented
The following facts about the Mark 50 Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 50 Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 50 Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 50 Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 50 Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 50 Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]CHA Mark 50 family | Waferpedia — waferpedia.comwaferpedia.com
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
Last updated Oct 8, 2026.
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