Disco
321
The Disco DAD-321 is a wafer dicing saw that dices wafers up to 6 inches in diameter. The Disco DAD-321 is equipped with a high-power spindle (1.0 kW or 1.5 kW) and a non-contact setup system.[1][2][3][4]
What it is
How it works
The Disco 321 uses a non-contact setup method and includes features such as a microscope with eyepiece and shutter, broken blade detection, and a floppy drive.[2]
Where it fits in the process flow
General reference — not yet source-verifiedThe dicing saw is used in the backend of semiconductor fabrication after wafer processing is complete, as the final step before die packaging.
Upstream processes include wafer grinding, polishing, and mounting on dicing tape. Downstream processes include die attach, wire bonding, and encapsulation.
Applications
The Disco 321 includes a 6-inch porous film frame chuck and a 6-inch universal chuck to accommodate standard wafer sizes.[1][2]
- Nano and Micro Fabrication
What do the numbers mean?
Power & electrical3
Wafer handling6
Optics & imaging1
- Microscope
- Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[2]
Dimensions & facilities1
Configuration & options13
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the maximum wafer size the Disco 321 can dice?
The Disco 321 can dice wafers up to 6 inches in diameter.[1][2]
What kind of chuck does the Disco 321 use?
The Disco 321 includes a 6-inch porous film frame chuck and a 6-inch universal chuck.[1][2]
Does the Disco 321 have broken blade detection?
Yes, the Disco 321 includes broken blade detection.[2]
Not publicly documented
The following facts about the 321 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 321 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 321 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 321 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 321 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 321 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]jmind.com — jmind.comjmind.com
- [2]gtsaz.com — gtsaz.comgtsaz.com
- [3]Disco DAD-321 Dicing Saw - GTS, Giorgio Technology Sales/Service — gtsaz.comgtsaz.com
- [4]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
- [5]Cleanroom Nanofabrication Facility — tmi.utexas.edutmi.utexas.edu
- [6]Instrumentation — tmi.utexas.edutmi.utexas.edu
Last updated Oct 7, 2026.
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