Edwards

IGX 600 M

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The Edwards IGX 600 M is a dry pump with an ISO100 inlet and KF25 exhaust. The Edwards IGX 600 M offers a pumping speed of 365 CFM and an ultimate pressure of 5.25 x 10-4 Torr. The Edwards IGX 600 M is used in applications such as load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch, and implant source.^[1]

IGX 600 M — Inventory photo — Fig. 01IGX 600 MInventory photo^[2]

What it is

The IGX 600 M has a pumping speed of 365 CFM and an ultimate pressure of 5.25 × 10⁻⁴ Torr.^[1]

The pump weighs 485 pounds and uses an ISO100 inlet and a KF25 exhaust connection.^[1]

Applications

The Edwards IGX 600 M dry pump is used for a range of semiconductor processes including load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch, and implant source.^[1]

What do the numbers mean?

Vacuum & pumping4

Exhaust: KF25^[1]
Pumping speed: 365 CFM^[1]
Ultimate pressure: 5.25 x 10-4 Torr^[1]
Type of product: dry pump^[1]

Dimensions & facilities1

Weight: 485 lbs^[1]

Configuration & options3

Inlet: ISO100^[1]
Manufacturer: Edwards^[2]
Model: IGX 600 M^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
iGX600M 200 V-230 V 50/60 Hz	—	—	Voltage range 200-230V, 50/60Hz	manualslib.com^[3]
iGX600M 380 V-460 V 50/60 Hz	—	—	Voltage range 380-460V, 50/60Hz	manualslib.com^[3]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ExhaustKF25^[1]
Pumping speed365 CFM^[1]
Ultimate pressure5.25 x 10-4 Torr^[1]
Type of productdry pump^[1]

Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of pump is the Edwards IGX 600 M?

The Edwards IGX 600 M is a dry pump.^[1]

What are the inlet and exhaust connections for the Edwards IGX 600 M?

The Edwards IGX 600 M has an ISO100 inlet and a KF25 exhaust.^[1]

What is the pumping speed of the Edwards IGX 600 M?

The Edwards IGX 600 M has a pumping speed of 365 CFM.^[1]

What ultimate pressure is given for the Edwards IGX 600 M?

The Edwards IGX 600 M has an ultimate pressure of 5.25 x 10-4 Torr.^[1]

Not publicly documented

The following facts about the IGX 600 M are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IGX 600 M are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IGX 600 M are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IGX 600 M are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IGX 600 M is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IGX 600 M are on record.
Answerable by: an OEM parts catalog or a service engineer