Edwards
IXH 610
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards IXH 610 is a dry vacuum pump. The Edwards IXH 610 is built for harsh chemical applications in semiconductor processing. The Edwards IXH 610 has a peak pumping speed of 665 m3/h and an ultimate pressure of 3.7 x 10-3 Torr.[1][2]
What it is
How it works
Where it fits in the process flow
The Edwards IXH 610 is used with load lock, transfer, metrology, lithography, physical vapor deposition, pre-clean, rapid thermal processing, strip and ash, etching, implant source, high-density plasma chemical vapor deposition, sub-atmospheric chemical vapor deposition, tungsten chemical vapor deposition, plasma-enhanced chemical vapor deposition, and low pressure chemical vapor deposition applications.[1][4][2]
Applications
The Edwards IXH 610 is used for harsh chemical processes in semiconductor manufacturing.[1]
The Edwards IXH 610 is applied in chemical vapor deposition, plasma-enhanced chemical vapor deposition, low pressure chemical vapor deposition, high-density plasma chemical vapor deposition, rapid thermal processing, lithography, physical vapor deposition, pre-clean, load lock, transfer, metrology, strip and ash, etching, and implant source service.[1][4][2]
What do the numbers mean?
Power & electrical2
Vacuum & pumping5
Gas & chemistry1
Dimensions & facilities2
Configuration & options5
- Fully refurbished[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Edwards IXH 610?
The Edwards IXH 610 is a pump.[3]
Not publicly documented
The following facts about the IXH 610 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IXH 610 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the IXH 610 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the IXH 610 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IXH 610 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IXH 610 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]idealvac.com — idealvac.comidealvac.com
- [2]ptbsales.com — ptbsales.comptbsales.com
- [3]inventory listing
- [4]provac.com — provac.comprovac.com
Last updated Oct 11, 2026.
