ENI

Spectrum 11002 00

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The ENI Spectrum 11002 00 is an RF generator. The ENI Spectrum 11002 00 has an output power of 11,000 W. The ENI Spectrum 11002 00 operates in a frequency range of 1.8 MHz to 2.17 MHz.^[1]^[2]

ENISpectrum 11002 00

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How it works

The ENI Spectrum 11002 00 is a power source that delivers RF output to semiconductor process hardware at a frequency band centered near the low-megahertz range.^[1]^[2]

Where it fits in the process flow

The ENI Spectrum 11002 00 is used with semiconductor manufacturing equipment, including process systems for deposition and etching.^[1]

What do the numbers mean?

Power & electrical9

Output power: 11,000 W (11 kW)^[1]
Frequency range: 1.8 MHz to 2.17 MHz^[1]
Input: 3-phase, 200-208 VAC^[2]
Input AC power: 200–208 VAC, 3-Phase, 50/60 Hz^[1]
Frequency range: 1.8 MHz – 2.17 MHz^[1]
Input power: 200–208 VAC, 3-Phase, 50/60 Hz^[1]
Output: 11000W @ 1.8-2.17MHz^[2]
Frequency range: 1.8 MHz – 2.17 MHz (centered around ~2 MHz)^[1]
Output power: 11 kW^[1]

Wafer handling1

Tuning technology: Integrated automatic frequency tuning to maximize power transfer without requiring complex external matching networks^[1]

Dimensions & facilities1

Physical weight: Approximately 56.8 kg (125 lbs)^[1]

Configuration & options15

Make: ENI^[3]
Model: Spectrum 11002 00^[3]
Part No: 11002-00^[2]
Model No: SPECTRUM^[2]
Marking: CE Marked^[2]
Part number: 0130-2221^[1]
Output power: 11000W^[2]
Input: 3ɸ, 200-208VAC^[2]
CE marking: CE Marked^[2]
Condition: Used^[1]
Condition: Working surplus^[2]
OEM: ENI^[3]
Part number (as listed by Point Analyzer): 0130-2221^[1]
Part number (as listed by Semiconductor Spares): 0190-33637^[2]
Model designation: Spectrum 11002-00^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Output power11,000 W (11 kW)^[1]
Frequency range1.8 MHz to 2.17 MHz^[1]
Input3-phase, 200-208 VAC^[2]
Input AC power200–208 VAC, 3-Phase, 50/60 Hz^[1]
Frequency range1.8 MHz – 2.17 MHz^[1]
Input power200–208 VAC, 3-Phase, 50/60 Hz^[1]
Output11000W @ 1.8-2.17MHz^[2]
Frequency range1.8 MHz – 2.17 MHz (centered around ~2 MHz)^[1]
Output power11 kW^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the ENI Spectrum 11002 00?

The ENI Spectrum 11002 00 is an RF generator.^[3]^[1]^[2]

Not publicly documented

The following facts about the Spectrum 11002 00 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Spectrum 11002 00 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Spectrum 11002 00 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Spectrum 11002 00 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Spectrum 11002 00 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Spectrum 11002 00 is not on record.
Answerable by: an OEM datasheet or a fab qualification report