EV Group
Gemini Automated Production Fusion
Wafer size
300mm
Performance
Throughput optimized handling sequence[1]
Optics
SmartView NT with 5x objectives[1]
How it works
The Gemini system employs a four-axis industrial robot for automated wafer transfer between FOUPs, the alignment module, and the bond chamber. The EVG CIM Framework software GUI manages the process flow, supporting drag-and-drop recipe programming and parallel processing of multiple jobs. Automated recording of process and machine parameters, along with password-protected user access levels and a throughput-optimized handling sequence, enables production-scaled operation.[1]
What do the numbers mean?
Wafer handling5
- 4 Axis Industrial Robot[1]
Optics & imaging2
- SmartView®NT Alignment Module with 5x - Objectives[1]
Performance1
- Throughput optimized handling sequence[1]
Control & software3
Configuration & options8
- Interlocked doors with signal light tower[1]
- Flexible process flow definition[1]
- Parallel processing of multiple jobs[1]
- Automated recording of process and machine parameters[1]
- Password protected user access levels[1]
- Foup loading with empty/present sensor[1]
- CE Certified[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What alignment system does the Gemini use?
The Gemini uses the SmartView®NT Alignment Module with 5x objectives.[1]
Is the EV Group Gemini CE certified?
Yes, the Gemini is CE certified.[1]
How are wafers loaded into the Gemini system?
Wafers are loaded via FOUP loading with an empty/present sensor, and a four-axis industrial robot handles wafer transfer within the system.[1]
What software controls the Gemini’s process flow?
The Gemini uses EVG CIM Framework Software GUI with drag-and-drop recipe programming and parallel processing capability.[1]
Not publicly documented
The following facts about the Gemini Automated Production Fusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gemini Automated Production Fusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gemini Automated Production Fusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gemini Automated Production Fusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gemini Automated Production Fusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gemini Automated Production Fusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 22, 2026.
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