EV Group
Gemini Automated Production Wafer
The EV Group Gemini Automated Production Wafer Bonder is a fully automated wafer bonding system. The EV Group Gemini Automated Production Wafer Bonder handles wafers up to 8"/200mm. The EV Group Gemini Automated Production Wafer Bonder includes face-to-face alignment.[1][2]
Plate 01EVG Gemini Fully Automated Production Bonding System
Lithography Equipment SupportWatch on YouTube
Wafer size
200mm
Performance
with Face to Face Alignment[1]
Gas delivery
1 purge gas line for process gas[1]
What it is
How it works
General reference — not yet source-verifiedA production wafer bonder in this class typically receives prepared wafers after front end patterning or after intermediate integration steps, then aligns and bonds them before later thinning, singulation, or package completion steps. The machine supports automated recipe control for production flow management.
What do the numbers mean?
Wafer handling5
- 4 Axis Industrial Robot[1]
- Open cassette loading with empty/present sensor[1]
- Loaded features
- Flexible process flow definition, drag and drop recipe programming, parallel processing of multiple jobs, automated recording of process and machine parameters, throughput optimized handling sequence, password protected user access levels, open cassette loading with empty/present sensor[1]
Gas & chemistry2
- 1 purge gas line for process gas[1]
Optics & imaging2
- SmartView®NT Alignment Module with 5x Objectives[1]
Performance5
Control & software3
Configuration & options20
- Interlocked doors with signal light tower[1]
- Flexible process flow definition[1]
- Parallel processing of multiple jobs[1]
- Automated recording of process and machine parameters[1]
- Password protected user access levels[1]
- Formic Acid Bubbler option for purging formic acid vapor into bond chamber[1]
- CE Certified[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Gemini Automated Production Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gemini Automated Production Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gemini Automated Production Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gemini Automated Production Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gemini Automated Production Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gemini Automated Production Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]web.archive.org — evgroup.com (Feb 18, 2005)web.archive.org
Last updated Oct 4, 2026.
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