Filmetrics
F50-UV
Wafer size
8"
Optics
5 nm – 40 µm[2]
What it is
The Filmetrics F50-UV is a thin-film metrology tool that measures film thickness by spectroscopic reflectometry.[2]
How it works
Where it fits in the process flow
The Filmetrics F50-UV is used after thin-film deposition to check thickness and optical characteristics.[1]
Applications
- measuring thin film thickness
- measuring optical characteristics
- collecting thickness uniformity maps
What do the numbers mean?
Wafer handling2
Optics & imaging4
Configuration & options12
- Light source
- deuterium + tungsten-halogen (dual light source; may choose one or both lamps)[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the Filmetrics F50-UV measure?
The Filmetrics F50-UV measures thin-film thickness and optical characteristics.[1][2]
What measurement method does the Filmetrics F50-UV use?
The Filmetrics F50-UV uses spectroscopic reflectometry based on the reflectance spectrum of a sample.[1][2]
Does the Filmetrics F50-UV support mapping?
The Filmetrics F50-UV uses an automated stage to collect thickness uniformity maps.[2]
Not publicly documented
The following facts about the F50-UV are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F50-UV are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F50-UV are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F50-UV are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F50-UV are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F50-UV is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [2]confluence.nanofab.ualberta.ca — confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
- [3]https://www.nanofab.ualberta.ca/category/fabrication/ — nanofab.ualberta.cananofab.ualberta.ca
Last updated Oct 3, 2026.
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