Hitachi
7800
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi 7800 is a CD-SEM designed for use with 8-inch wafers. The standard resolution of the Hitachi 7800 is 5 nm at 1 kV. The high-resolution mode achieves 1 nm. The measurement precision is static 3 sigma ±0.010 µm. Stage travel ranges for the Hitachi 7800 are X and Y from 0 to 200 mm, Z from 4 to 12 mm, rotation 0 to 360°, and tilt 0 to 60°. The throughput is 5 wafers per hour. The vacuum system does not include vacuum pumps.[2]
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
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Not publicly documented
Field notes
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Frequently asked questions
What wafer size does the Hitachi 7800 support?
The Hitachi 7800 supports 8-inch wafers.[2]
What is the standard resolution of the Hitachi 7800?
The standard resolution is 5 nm at 1 kV.[2]
What is the throughput of the Hitachi 7800?
The throughput is 5 wafers per hour.[2]
What is the measurement precision of the Hitachi 7800?
The measurement precision is static 3 sigma ±0.010 µm.[2]
What is the stage travel range of the Hitachi 7800?
Stage travel ranges are X and Y from 0 to 200 mm, Z from 4 to 12 mm, rotation 0 to 360°, and tilt 0 to 60°.[2]
Not publicly documented
The following facts about the 7800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the 7800 are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 7800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 7800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 7800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]S 7800 DR-SEM — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 30, 2026.