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Hitachi

IS 2700 Defect

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Hitachi IS 2700 is an automatic defect inspection system used in semiconductor manufacturing. The tool belongs to the metrology and inspection category of process equipment.[1][2]

The Hitachi IS 2700 Defect inspection system handles 200-millimeter (8-inch) wafers.[1]

How it works

General reference — not yet source-verified

As a class, automated defect inspection tools optically or electronically scan the surface of a processed wafer to detect particles, pattern defects, scratches, and other anomalies.

Hitachi defect inspection platforms typically combine brightfield or darkfield optical imaging with image-processing algorithms to compare die-to-die or die-to-database patterns and identify non-conforming features.

Where it fits in the process flow

General reference — not yet source-verified

Defect inspection systems are used after critical process steps such as lithography, etch, deposition, and chemical-mechanical planarization. The tools provide in-line monitoring to detect yield-limiting defects before wafers proceed to subsequent process steps.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options3

Manufacturer
Hitachi[1]
Accurate?
Model
IS 2700[1]
Accurate?
Tool type
Defect Inspection[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the IS 2700 Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IS 2700 Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the IS 2700 Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the IS 2700 Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the IS 2700 Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the IS 2700 Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]IS 2700 Defect — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 30, 2026.

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