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Hitachi

S-4800

Metrology & InspectionHitachi S 4800 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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  • Plate 01Hitachi S-4800 and SU8030 FE-SEM Instructional Video - Northwestern University

    NUANCE CenterWatch on YouTube
  • Plate 02MRL Hitachi S 4800 Basic Training Video

    MRL FacilitiesWatch on YouTube
  • Plate 03Part 2-Hitachi S-4800 Scanning electron Microscope (SEM)

    Cmsc PolymerWatch on YouTube
  • Plate 04Hitachi S-4800 SEM sample insertion

    Advanced Microscopy Facility workshopsWatch on YouTube
  • Plate 05Hitachi S-4800 SEM beam alignment

    Advanced Microscopy Facility workshopsWatch on YouTube
  • Plate 06Introduction to the SEM - Scanning Electron Microscope - Hitachi S-4800 - Part 1

    Ken SwedenWatch on YouTube

What it is

The Hitachi S-4800 is a high-resolution field-emission scanning electron microscope (FESEM) that uses a cold field-emission electron source. The instrument is capable of imaging and compositional analysis and is routinely equipped with a STEM detector and an energy-dispersive X-ray spectroscopy (EDS or EDX) detector.[3][1]

How it works

General reference — not yet source-verified

The cold field-emission source requires an ultra-high vacuum and operates at room temperature without thermal assistance, providing a stable beam with a narrow energy spread. Beam focusing and astigmatism correction are controlled by condenser and objective lenses, with an objective aperture that trades beam current for resolution and depth of field.

What do the numbers mean?

Optics & imaging1

detectors
STEM and EDX detectors[1]
Accurate?

Configuration & options6

Microscope type
FESEM[1]
Accurate?
Model
S4800[1]
Accurate?
OEM
Hitachi[1]
Accurate?
instrument type
FESEM[1]
Accurate?
electron source
cold field-emission source[1]
Accurate?
instrument designation
Hitachi S-4800 HR-SEM[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of electron source does the Hitachi S-4800 use?

The Hitachi S-4800 uses a cold field-emission electron source.[1]

What detectors are available on the Hitachi S-4800?

The Hitachi S-4800 can be equipped with a scanning transmission electron microscopy (STEM) detector and an energy-dispersive X-ray spectroscopy (EDX) detector.[1]

Not publicly documented

The following facts about the S-4800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-4800 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S-4800 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S-4800 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S-4800 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S-4800 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.ualberta.ca — nanofab.ualberta.cananofab.ualberta.ca
  2. [2]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
  3. [3]https://www.cnfusers.cornell.edu/sites/default/files/Equipment-Resources/CNF_SEM_basicsv2.pdf — cnfusers.cornell.educnfusers.cornell.edu
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Last updated Oct 3, 2026.

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