Hitachi
S 4800 I
The Hitachi S 4800 I is a scanning electron microscope (SEM). The Hitachi S 4800 I achieves a resolution of 1.0 nm at 15 kV accelerating voltage and 2.0 nm at 1 kV. The Hitachi S 4800 I offers magnification from 30x to 800,000x in high-magnification mode.[1]
What it is
The Hitachi S 4800 I is a scanning electron microscope used for metrology and inspection.[1]
The Hitachi S 4800 I includes a main body, a display unit with a PC, monitor, keyboard, and mouse, and a chiller as an option when no water source is present.[1]
How it works
General reference — not yet source-verifiedA scanning electron microscope forms images by scanning a focused electron beam across a sample and collecting emitted signals from the interaction volume.
A scanning electron microscope uses electron optics, a vacuum column, and detectors to produce high-magnification images of surface features.
Where it fits in the process flow
General reference — not yet source-verifiedA scanning electron microscope sits in the inspection and metrology flow, where it is used to examine surfaces, measure fine structural features, and review process results after fabrication steps.
What do the numbers mean?
Power & electrical1
- Resolution
- 1.0 nm (Accelerating voltage: 15 kV, WD: 4mm; 2.0 nm (Accelerating voltage: 1 kV, WD: 1.5 mm)[1]
Vacuum & pumping2
Optics & imaging5
Control & software3
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of instrument is the Hitachi S 4800 I?
The Hitachi S 4800 I is a scanning electron microscope.[1]
Not publicly documented
The following facts about the S 4800 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4800 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 4800 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 4800 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 4800 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 4800 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 5, 2026.
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