KLA

2133 Brightfield

Metrology & Inspection Wafer Transfer KLA 21xx family

Research Quality: 50% complete

The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers. The KLA 2133 Brightfield is categorized as Metrology & Inspection. The KLA 2133 Brightfield includes wafer transfer and cassette transfer handling.^[1]^[2]

2133 Brightfield — Inventory photo — Fig. 012133 BrightfieldInventory photo^[2]

Wafer size

Wafer Transfer

Power

3 line of 208 Vac 20 Amp^[2]

Vacuum

100 PSI^[2]

What it is

The KLA 2133 Brightfield is a metrology and inspection tool.^[1]

The KLA 2133 Brightfield is a wafer inspection tool for 6-inch wafers.^[1]^[2]^[3]

How it works

The KLA 2133 Brightfield uses cassette transfer, wafer transfer, a scan stage, and a boat elevator or robot transfer.^[2]^[1]

The KLA 2133 Brightfield includes 2 x 25 auto load, process vacuum of 23 InHg, inlet power of 3 line of 208 Vac 20 Amp, CDA of 100 PSI, and blower exhaust for cooling.^[2]^[1]

Where it fits in the process flow

The KLA 2133 Brightfield handles wafer transfer and automated loading for 6-inch wafers.^[2]^[3]^[1]

Applications

The KLA 2133 Brightfield is used for wafer inspection on 6-inch wafers.^[1]^[2]^[3]

The KLA 2133 Brightfield belongs to the KLA 21xx family.^[1]

What do the numbers mean?

Power & electrical1

Inlet Power: 3 line of 208 Vac 20 Amp^[2]

Vacuum & pumping2

CDA: 100 PSI^[2]
Exhaust for Cooling: Blower^[2]

Wafer handling7

Cassette Transfer^[2]
Wafer size: Wafer Transfer^[2]; Boat Elevator / Robot Transfer^[2]
Wafer size: 6 inch^[2]
Wafer handling: Cassette Transfer^[1]
Wafer handling: Wafer Transfer^[1]
Wafer handling: Boat Elevator / Robot Transfer^[1]

Configuration & options6

2 x 25 Auto Load^[2]; Scan Stage^[2]
Process Vac: 23 InHg^[2]
OEM: KLA^[2]
Model: 2133 Brightfield^[2]
Category: Metrology & Inspection^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Inlet Power3 line of 208 Vac 20 Amp^[2]
CDA100 PSI^[2]
Exhaust for CoolingBlower^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the KLA 2133 Brightfield handle?

The KLA 2133 Brightfield handles 6-inch wafers.^[1]^[2]^[3]

What loading and transfer features are specified for the KLA 2133 Brightfield?

The KLA 2133 Brightfield has 2 x 25 auto load, cassette transfer, scan stage, wafer transfer, and boat elevator or robot transfer.^[2]^[1]

What utility requirements are specified for the KLA 2133 Brightfield?

The KLA 2133 Brightfield specifies process vac of 23 InHg, inlet power of 3 line of 208 Vac 20 Amp, CDA of 100 PSI, and blower exhaust for cooling.^[2]^[1]

Not publicly documented

The following facts about the 2133 Brightfield are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2133 Brightfield are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2133 Brightfield are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2133 Brightfield are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2133 Brightfield are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2133 Brightfield is not on record.
Answerable by: an OEM datasheet or a fab qualification report