KLA
6420
What it is
How it works
The KLA-Tencor Surfscan 6420 uses optical particle inspection on wafer surfaces. The system detects, counts, and sizes particles as light point defects.[1]
The Surfscan 6420 measures particles on polished silicon surfaces and can also inspect thin contamination in nitride, oxide, and polymer or resist layers. The system does not count small surface roughness as particle contamination.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe class of particle inspection tools fits after wafer or film processing steps where surface contamination matters. The class is used to check wafers before downstream processing continues.
Applications
The KLA-Tencor Surfscan 6420 is used to inspect polished silicon surfaces with or without epitaxial layers. The system is also used to inspect contamination in thin nitride, oxide, and polymer or resist layers.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Laser inoperative
What do the numbers mean?
Power & electrical1
- new power supply[2]
Wafer handling1
Optics & imaging3
Control & software1
- software boots - measurement, board functionality[2]
Configuration & options5
Vintage & configurations
- 2023-04decommissioned[1]
The KLA-Tencor Surfscan 6420 was decommissioned in April 2023.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configurationnew power supply[2]
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the Surfscan 6420 detect?
The Surfscan 6420 detects, counts, and sizes particles as light point defects.[1]
What surfaces can the Surfscan 6420 inspect?
The Surfscan 6420 can measure particles on polished silicon surfaces with or without epitaxial layers, and it can inspect contamination in thin nitride, oxide, and polymer or resist layers.[1]
Not publicly documented
The following facts about the 6420 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 6420 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6420 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 6420 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the 6420 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]labadviser.nanolab.dtu.dk — labadviser.nanolab.dtu.dklabadviser.nanolab.dtu.dk
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Oct 10, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
