Waferpedia

KLA

Candela CS 10 V Wafer Inspector

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Candela CS 10 V Wafer Inspector — Inventory photo
Fig. 01Candela CS 10 V Wafer InspectorInventory photo[1]

What it is

The model designation of this equipment is Candela CS 10 V. The system is categorized as metrology and inspection equipment within the semiconductor manufacturing tool set.[1][2]

How it works

General reference — not yet source-verified

KLA Candela wafer inspectors operate by scanning a wafer with multiple laser beams of different wavelengths, typically blue and red. The beams are directed at the wafer surface at an oblique angle, and the scattered light is collected by photodetectors positioned at various angles. Surface defects scatter light differently than a pristine surface, allowing the system to identify and classify anomalies. The tool generates a defect map with coordinates and type classification for each detected defect.

What do the numbers mean?

Power & electrical5

50/60 Hz[1]
Accurate?
Single Phase[1]
Accurate?
Model
Candela CS 10 V[1]
Accurate?
Power
50/60 Hz[2]
Accurate?
Electrical configuration
Single Phase[2]
Accurate?

Wafer handling1

Equipment type
Wafer inspector[2]
Accurate?

Configuration & options4

5 A[1]
Accurate?
Manufacturer
KLA[1]
Accurate?
Category
Metrology & Inspection[2]
Accurate?
Current
5 A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • ConfigurationSingle Phase[1]
  • ModelCandela CS 10 V[1]
  • Power50/60 Hz[2]
  • Electrical configurationSingle Phase[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the KLA Candela CS 10 V?

It is a wafer inspector in metrology and inspection equipment.[1]

What model name is given for this equipment?

The model name is Candela CS 10 V.[1]

Not publicly documented

The following facts about the Candela CS 10 V Wafer Inspector are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 10 V Wafer Inspector are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 10 V Wafer Inspector are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Candela CS 10 V Wafer Inspector are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Candela CS 10 V Wafer Inspector are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Candela CS 10 V Wafer Inspector is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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