KLA

M Gage 300 Film Thickness

Q: Can the M Gage 300 compute film thickness?

The M Gage 300 can compute film thickness from sheet resistance when specific resistivity is known.

Q: What measurement method does the M Gage 300 use?

The M Gage 300 uses a non-contact eddy-current measurement method.

Q: How is the measurement data selection handled?

The measurement data selection is switch selectable, and the choice of units is also switch selectable.

KLA M Gage 300 Film Thickness family

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The Tencor M-Gage 300 is a Sheet Resistance Measurement System that measures sheet resistance in ohms per square or milliohms per square. The M-Gage 300 is a non-contact measurement instrument which takes measurements by Eddy Current. The M-Gage 300 measures sheet resistance on an up to 6” wafer and can accommodate 150mm (6”) wafers as well as standard 2”, 3”, 4”, and 5” wafers.^[1]^[2]

KLAM Gage 300 Film Thickness

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How it works

The M Gage 300 measures sheet resistance in ohms per square or milliohms per square. The system can compute film thickness from sheet resistance when specific resistivity is known, and the measurement data selection is switch selectable.^[1]^[2]

Where it fits in the process flow

The M Gage 300 fits in semiconductor metrology after film deposition or other sheet-resistance-sensitive process steps. The measured sheet resistance can be used to infer film thickness when resistivity is known, which makes the tool relevant to process control and layer characterization.^[1]^[2]

Applications

The M Gage 300 is used for sheet resistance measurement on semiconductor wafers. The measured quantity can be converted to film thickness when film resistivity is known, so the tool applies to conductive deposited films and related thin-film process monitoring.^[1]^[2]

What do the numbers mean?

Wafer handling3

Substrate diameter: 2”, 3”,4”,5”,6” standard wafers; 150mm (6”) wafers^[2]
Substrate thickness: 200mm to 1000mm^[2]
Resistivity range: 0.05 mOhm-cm to 100 mOhm-cm or 0.05 Ohm-cm to 100 Ohm-cm (for a 500 micrometer wafer)^[2]

Performance1

Repeatability: Total repeatability is the standard deviation percent of mean value, +/-1 count: 1 to 100 mOhm/sq and Ohm/sq: 1.0%; 100 to 500: 2.0%; 500 to 1,000: 4.0%; 1,000 to 1,999: 6.0%^[2]

Dimensions & facilities1

Dimensions: Tester: 24cm (9.5”)W x 19cm (7”)H x 39cm (15.5”)D^[1]

Configuration & options7

Measurement principle: Non-contact Eddy Current measurement^[1]
Sheet resistance range: 1 ohm/sq to 1,999 ohm/sq; 1 mOhm/sq to 1,999 mOhm/sq^[1]
Film thickness range: 100 Angstroms min to 270K Angstroms (calculated by DDC when resistivity is 2.7 uOhm-cm)^[1]
Display: 3 ½ Digit LED display, autoranges over three decades^[1]
Measurement modes: Manual and Automatic modes; 5-point and 9-point multi-point measurements supported^[2]
Units of measurement: Ohms per square or milliohms per square, switch selectable^[1]
Power requirements: 110Vac, 50-60Hz, <15A^[1]

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Frequently asked questions

What does the M Gage 300 measure?

The M Gage 300 measures sheet resistance in ohms per square or milliohms per square.^[1]^[2]

Can the M Gage 300 compute film thickness?

The M Gage 300 can compute film thickness from sheet resistance when specific resistivity is known.^[1]^[2]

What measurement method does the M Gage 300 use?

The M Gage 300 uses a non-contact eddy-current measurement method.^[1]

How is the measurement data selection handled?

The measurement data selection is switch selectable, and the choice of units is also switch selectable.^[1]

Not publicly documented

The following facts about the M Gage 300 Film Thickness are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M Gage 300 Film Thickness are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the M Gage 300 Film Thickness are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the M Gage 300 Film Thickness are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the M Gage 300 Film Thickness are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the M Gage 300 Film Thickness is not on record.
Answerable by: an OEM datasheet or a fab qualification report