Waferpedia

KLA

P 10

Metrology & InspectionKLA P family
Research Quality: 40% complete

The KLA P 10 is a profilometer. The KLA P 10 operates on 1-phase, 50 Hz, 2A, 220V electrical supply.[1]

P 10 — Inventory photo
Fig. 01P 10Inventory photo[1]

What it is

General reference — not yet source-verified

A profilometer is a metrology instrument used to measure surface topography by tracing a stylus across a sample.

How it works

General reference — not yet source-verified

A profilometer operates by bringing a diamond-tipped stylus into contact with the surface of a sample and moving it laterally along a measurement path. Vertical deflections of the stylus are converted into an electrical signal by a transducer, producing a two-dimensional profile of the surface topography.

What do the numbers mean?

Power & electrical3

Frequency
50 Hz[1]
Accurate?
Voltage
220V[1]
Accurate?
Power
1 phase, 50 Hz, 2A, 220V[1]
Accurate?

Configuration & options7

Phase
1 Phase[1]
Accurate?
2A[1]
Accurate?
Type
Profilometer[1]
Accurate?
Current
2A[1]
Accurate?
Manufacturer
KLA[1]
Accurate?
Model
P 10[1]
Accurate?
Equipment type
Profilometer[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Frequency50 Hz[1]
  • Voltage220V[1]
  • Power1 phase, 50 Hz, 2A, 220V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of equipment is the KLA P 10?

The KLA P 10 is a profilometer.[1]

What full product name is used for the model P 10?

The full product name is the KLA P 10 Profilometer.[1]

Not publicly documented

The following facts about the P 10 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 10 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 10 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 10 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 10 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 10 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
Was this page accurate?

Last updated Oct 10, 2026.

Compare with similar tools

View all →