KLA
P 16 + Profiler
The KLA P-16+ Profiler is a stylus-based surface profiler for step height, roughness, waviness, and stress measurements. The KLA P-16+ Profiler offers a vertical range of 327 µm and supports wafer sizes from 2 to 12 inches.[1][2]
What it is
The KLA P 16 + Profiler is a stylus profilometer used for surface metrology and inspection.[1]
The KLA P 16 + Profiler is a KLA system with wafer sizes from 2 inch to 12 inch.[2]
How it works
Where it fits in the process flow
The KLA P 16 + Profiler supports production and process monitoring.[1]
Applications
What do the numbers mean?
Wafer handling1
Control & software2
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the KLA P 16 + support?
The KLA P 16 + supports wafer sizes of 2, 3, 4, 5, 6, 8, and 12 inch.[2]
What is the vertical range of the P 16 + stylus profiler?
The vertical range of the P 16 + is 327 micrometers.[2]
What stage and stylus specifications does the P 16 + have?
The P 16 + has a fully motorized X-Y-Z, theta, and level stage, and its stylus has a radius of 2 micrometers with a 60-degree cone angle.[2]
Is the P 16 + suitable for CMP monitoring?
Yes, the P 16 + is used for CMP monitoring and bump metrology applications.[1]
Not publicly documented
The following facts about the P 16 + Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 16 + Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 16 + Profiler are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 16 + Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 16 + Profiler are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 16 + Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Profilometer P16+ from KLA Tencor — nanoquim.icmab.esnanoquim.icmab.es
- [2]Inventory photo
Last updated Oct 11, 2026.
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