KLA
P 17 Surface
The KLA P 17 Surface is a surface profilometer in metrology and inspection. The KLA P 17 Surface uses a stylus profiler for step height and surface roughness measurements. The KLA P 17 Surface supports 2D and 3D measurements.[1][2]
What it is
The KLA P 17 Surface is a surface profilometer in metrology and inspection.[1][3]
How it works
A stylus profiler is used to measure step height and surface roughness, and related measurements can include bow and stress.[2]
Where it fits in the process flow
What do the numbers mean?
Power & electrical2
- 50/60 Hz[3]
Wafer handling1
Dimensions & facilities2
Configuration & options10
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tencor P-17 OF | — | — | Open Frame version with a bigger frame for larger samples; can be configured for 300 mm wafers or a 240 x 240 mm chuck. | kla.com[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What step height measurement range does the P-17 provide?
The P-17 stylus profilometer measures step heights from a few nanometers to one millimeter.[2]
What scan length can the P-17 achieve without stitching?
The system supports scans up to 200 mm without stitching.[2]
What wafer sizes or sample configurations can the P-17 handle?
The P-17 can be configured for 300 mm wafers, or with a 240 x 240 mm chuck. The P-17 OF (Open Frame) variant provides a larger frame for larger samples.[2]
Not publicly documented
The following facts about the P 17 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 17 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the P 17 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 17 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 17 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the P 17 Surface are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]kla.com — kla.comkla.com
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
Last updated Oct 5, 2026.
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