KLA
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The KLA Prometrix UV 1050 is a thin film measurement tool. The KLA Prometrix UV 1050 uses broadband UV optics and dual beam spectrophotometry. The KLA Prometrix UV 1050 supports wafer sizes of 100 mm, 150 mm, and 200 mm.[1][2]
The Prometrix UV 1050 uses broadband UV optics and dual-beam spectrophotometry to measure film thickness.[2]
A broadband xenon arc lamp serves as the light source for the system.[2]
The system includes a color camera for imaging, automatic focus on the measurement site, and stage resolution of 0.25 µm in x-y and 0.025 µm in z.[2]
The Prometrix UV 1050 supports simultaneous multilayer and enhanced single-layer (ESML) measurements over more than 500 discrete wavelengths.[2]
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The following facts about the Prometrix UV 1050 Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Prometrix UV 1050 Film Thickness Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Prometrix UV 1050 Film Thickness Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Prometrix UV 1050 Film Thickness Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Prometrix UV 1050 Film Thickness Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Prometrix UV 1050 Film Thickness Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 24, 2026.
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