KLA
Plate 01KLA-Tencor Surfscan 6400 Defect Inspection System (ID# 3980)
The KLA Surfscan 6400 family is a metrology and inspection tool family.[2]
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The KLA Surfscan 6400 family is a metrology and inspection tool family.[2]
The KLA Surfscan 6400 is an unpatterned bare-wafer surface defect and particle inspection system.[2]
The KLA Surfscan 6400 Film Surface Analysis is a metrology and inspection system for film surface analysis.[2]
The KLA Surfscan 6400 Film Surface Analysis supports 200mm wafers.[2]
The following facts about the Surfscan 6400 Refurbishment Services are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6400 Refurbishment Services are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6400 Refurbishment Services are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6400 Refurbishment Services are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6400 Refurbishment Services are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6400 Refurbishment Services is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 9, 2026.
The ABM-407B-2-S-CE-S293 is a robot.