Waferpedia

KLA

UV 1280 SE Thin Film Thickness Measurement

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA UV 1280 SE is a thin film thickness measurement tool designed for 12-inch wafer metrology.[1][2]

UV 1280 SE Thin Film Thickness Measurement — Inventory photo
Fig. 01UV 1280 SE Thin Film Thickness MeasurementInventory photo[1]

What it is

The KLA UV 1280 SE is a thin film thickness measurement tool designed for 12-inch wafer metrology.[1][2]

How it works

General reference — not yet source-verified

The tool directs a beam of light onto the wafer surface and analyzes the reflected spectrum. By comparing the measured spectrum to optical models, the tool calculates the thickness and optical constants of thin films.

What do the numbers mean?

Power & electrical3

Voltage
200 V[2]
Accurate?
Power
1.8 kW[2]
Accurate?
Single phase[2]
Accurate?

Wafer handling2

Wafer size
12 inch[1]
Accurate?
Wafer Sizes
12 inch[1]
Accurate?

Configuration & options3

Vintage (year of manufacture)
2000[1]
Accurate?
Make
KLA[1]
Accurate?
Model
UV 1280 SE[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage200 V[2]
  • Power1.8 kW[2]
  • ConfigurationSingle phase[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What are the electrical requirements for the UV 1280 SE?

The tool requires 200 V single-phase power and consumes 1.8 kW.[2][8][9][10]

Not publicly documented

The following facts about the UV 1280 SE Thin Film Thickness Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UV 1280 SE Thin Film Thickness Measurement are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UV 1280 SE Thin Film Thickness Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UV 1280 SE Thin Film Thickness Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UV 1280 SE Thin Film Thickness Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UV 1280 SE Thin Film Thickness Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (10)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]KLA P-7 vs KLA UV 1280 SE Thin Film Thickness Measurement comparison | Waferpedia — waferpedia.comwaferpedia.com
  9. [9]KLA PN 159336 Below Wafer Detector Assy vs KLA UV 1280 SE Thin Film Thickness Measurement comparison | Waferpedia — waferpedia.comwaferpedia.com
  10. [10]KLA AIT XUV Darkfield vs KLA UV 1280 SE Thin Film Thickness Measurement comparison | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 10, 2026.

Compare with similar tools

View all →