Lam Research
2300
The Lam 2300 is an etch system from the Lam 2300 series. The Lam 2300 Etch Chamber supports 8-inch and 12-inch wafers. The Lam 2300 Etch Chamber includes three chambers for insulating film, metal, and ashing processes.[1]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedAn etch system follows pattern definition steps and supports material removal from exposed regions of the wafer.
Applications
The Lam 2300 etch chamber is configured for insulating film etch, metal etch, and ashing.[1]
What do the numbers mean?
Power & electrical2
Wafer handling4
Control & software1
- HDD & Software included[1]
Configuration & options11
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Lam 2300 Etch Chamber | — | 2023 | Described as an etch chamber with 8-inch and 12-inch wafer sizes, 3 chambers, and included subsystems/software. | Equipment inventory listing[1] |
| Lam 2300 | — | 2019 | Listed as 12-inch equipment with KIYO EXP MRT. | Equipment inventory listing[2] |
| Lam 2300, 12" KIYO EXP MRT | — | 2019–2019 | Described as a 12-inch unit with KIYO EXP MRT. | Equipment inventory listing[2] |
| Lam 2300, 12" | — | 2016–2016 | Described as a 12-inch unit. | Equipment inventory listing[3] |
| 2300 Etch Chamber | — | — | Configuration with three chambers for insulating film, metal, and ashing; set up for 8-inch wafers; includes Exelan Flex 45 dielectric etch chamber | Equipment inventory listing[1] |
| 2300 KIYO EXP MRT | — | — | 12-inch configuration labeled KIYO EXP MRT, 2019 vintage | Equipment inventory listing[2] |
| 2300 | — | — | 12-inch configuration, 2016 vintage | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- ADP-ADS Series 2 Dry Pump User Manual - mu_adp2-lm-p-h_05_gb_release07-08.pdfManualumd.edu
- wet_etch_121500.pdfDocumentumd.edu
- ADP-ADS Series 2 Dry Pump User Manual - mu_adp2-lm-p-h_05_gb_release07-08.pdfManualumd.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What subsystems are part of a Lam 2300 etch chamber?
The Lam 2300 etch chamber includes hard-drive storage and software. The Lam 2300 etch chamber also includes all pumps, generators, and other subsystems.[1]
Not publicly documented
The following facts about the 2300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 2300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]inventory listing
- [3]Equipment inventory listing
- [4]ADP-ADS Series 2 Dry Pump User Manual - mu_adp2-lm-p-h_05_gb_release07-08.pdf — nanocenter.umd.edunanocenter.umd.edu
- [5]Prestis™ - Lam Research — lamresearch.com (May 19, 2026)web.archive.org
Last updated Oct 10, 2026.
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