Lam Research
Gasonics Aura 1000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The GaSonics AURA 1000 is an automated stripper system. The GaSonics AURA 1000 uses microwave energy to create a plasma in a ceramic/quartz reaction chamber. The GaSonics AURA 1000 includes a controller, RF generator, and wafer handling system.[1]
What it is
How it works
The Aura 1000 uses a microwave plasma generator to create a reactive oxygen plasma for ashing organic materials. A magnetron supplies microwave energy through a waveguide into a ceramic or quartz reaction chamber where the plasma is formed.[1]
The system is controlled by a main computer that sequences all mechanical and pneumatic functions, monitors sensors, and stores process recipes. A touch screen display provides the operator interface.[1]
Pneumatic components are powered by nitrogen or clean dry air. The vacuum system uses bellows valves controlled by pneumatics, which are enabled only when the computer confirms safe conditions.[1]
What do the numbers mean?
Power & electrical1
Gas & chemistry1
Dimensions & facilities1
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Gasonics Aura 1000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Aura 1000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Aura 1000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Aura 1000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Aura 1000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Aura 1000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]manualslib.com — manualslib.commanualslib.com
- [2]inventory listing
Last updated Sep 30, 2026.
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