Mattson
Steag / AST 2900 RTP
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedRapid thermal processors use high-intensity radiant heat sources, such as quartz halogen lamps, to heat wafers rapidly. The wafer is typically placed in a quartz chamber, and the atmosphere is controlled by a gas delivery system. Temperature is regulated by a closed-loop controller with feedback from a thermocouple or pyrometer.
Where it fits in the process flow
General reference — not yet source-verifiedRTP systems are integrated into semiconductor manufacturing lines for discrete thermal steps. Common applications include annealing after ion implantation, contact sintering, and formation of thin-film oxides. RTP processing often occurs after deposition or implantation steps and before subsequent processing or characterization.
Applications
General reference — not yet source-verifiedApplications of rapid thermal processing include damage annealing in implanted semiconductors, sintering of metallic contacts, crystallization of amorphous films, and thermal oxidation of silicon and compound semiconductors.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the model number of the Mattson Steag / AST 2900 RTP?
The model number is 2900.[1]
What type of equipment is the Mattson Steag / AST 2900?
The Mattson Steag / AST 2900 is a rapid thermal processor (RTP).[1][2]
What category does the Mattson Steag / AST 2900 RTP fall under in equipment classification?
The equipment category is Thermal / Diffusion.[2]
Not publicly documented
The following facts about the Steag / AST 2900 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the Steag / AST 2900 RTP are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Steag / AST 2900 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Steag / AST 2900 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Steag / AST 2900 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Steag / AST 2900 RTP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Steag / AST 2900 RTP — Mattson | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Sep 29, 2026.
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