MKS
The Vision 2000-E™ is a residual gas analyzer for multi-pressure, CVD and ALD processes. The Vision 2000-E™ has a minimum detectable partial pressure of less than 2e-11 Torr. The Vision 2000-E™ provides continuous in situ monitoring and baseline monitoring for air leaks and background contamination.[1]
Vacuum
Multi-pressure, CVD & ALD processes[1]
Gas delivery
Residual Gas Analyzer (Mass Spectrometer)[1]
The MKS Vision 2000-E is a residual gas analyzer designed for multi-pressure, chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. The instrument has a minimum detectable partial pressure of less than 2e-11 Torr (less than 2.7e-9 Pa). The Vision 2000-E features continuous in situ monitoring, baseline monitoring for air leaks and background contamination, and a Remote Vacuum Controller (RVC) for failsafe vacuum operation.[1]
The Vision 2000-E is specifically applied to baseline monitoring for air leaks and background contamination, enabling fast identification of vacuum integrity issues during process recovery and maintenance.[1]
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The minimum detectable partial pressure is less than 2e-11 Torr (less than 2.7e-9 Pa).[1]
The Vision 2000-E is designed for multi-pressure, chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes.[1]
Yes, the instrument provides continuous in situ monitoring of the vacuum environment.[1]
The instrument includes a Remote Vacuum Controller (RVC) for failsafe vacuum operation.[1]
The baseline monitoring function detects air leaks and background contamination.[1]
The following facts about the Vision 2000-E™ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Vision 2000-E™ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Vision 2000-E™ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Vision 2000-E™ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Vision 2000-E™ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Vision 2000-E™ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.