Waferpedia

Neslab

HX 500 Chiller

The Neslab HX 500 Chiller is a process chiller. The Neslab HX 500 Chiller has a digital, non-bath controller and CP-55 pump type. The Neslab HX 500 Chiller has 440-480V, 60Hz, 3-phase power and R-22 refrigerant.[1][2]

HX 500 Chiller — Inventory photo
Fig. 01HX 500 ChillerInventory photo[1]

Power

440-480V[1]

Vacuum

CP-55[1]

What it is

The HX 500 is a water-cooled chiller with a digital, non bath controller, a CP-55 pump type, three phase power, and R-22 refrigerant.[1][2]

How it works

The HX 500 is a closed-loop temperature-control unit with pump-driven circulation, refrigeration-based cooling, and selectable condenser configurations.[3][6]

Applications

The HX 500 is used for process cooling in semiconductor and industrial equipment where stable fluid temperature is required.[3][5]

The HX 500 is linked to sputtering, CMP, vacuum systems, plasma etch equipment, laser systems, medical imaging, and general test and manufacturing equipment.[3][4]

What do the numbers mean?

Power & electrical12

440-480V[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Power
440-480V[1]
Accurate?
Cooling capacity at 60 Hz and 20°C
15,700 watts[3]
Accurate?
Cooling capacity at 50 Hz and 20°C
13,030 watts[3]
Accurate?
Pump performance at 60 Hz, Pump 1
23 gpm at 50 psig (TU 9)[3]
Accurate?
Pump performance at 60 Hz, Pump 2
19 gpm at 50 psig (CP 75)[3]
Accurate?
Pump performance at 50 Hz, Pump 1
16 gpm at 50 psig (TU 9)[3]
Accurate?
Pump performance at 50 Hz, Pump 2
10 gpm at 40 psig (CP 75)[3]
Accurate?
Power requirements at 60 Hz
208-230V 3ø / 460V 3ø[3]
Accurate?
Power requirements at 50 Hz
380-415V 3ø[3]
Accurate?
Power
440-480V, 60Hz, 3 phase[1]
Accurate?

Vacuum & pumping2

Pump Type
CP-55[1]
Accurate?
Applications
Lasers, process cooling, MRI, medical lasers, linear accelerators, diffusion pumps, vacuum systems, plasma etch equipment[4]2 sources
Accurate?

Control & software1

Controller
Digital, non bath[1]
Accurate?

Dimensions & facilities2

Unit dimensions (H x W x D)
51.625 x 46 x 28.75 in / 131.1 x 116.8 x 73 cm[3]
Accurate?
Unit weight
746 lb / 338.4 kg[3]
Accurate?

Configuration & options15

Frequency
60Hz[1]
Accurate?
Refrigerant
R-22[1]
Accurate?
Make
Neslab[1]
Accurate?
Model
HX 500[1]
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Temperature range
5°C to 35°C[3]
Accurate?
Stability
± 0.1°C[3]
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Condenser
air or water cooled[3]
Accurate?
Reservoir size
28 gallons / 106 liters[3]
Accurate?
Plumbing connections, inlet/outlet process
1 in. FNPT[3]
Accurate?
Plumbing connections, inlet/outlet facility
1 in. FNPT[3]
Accurate?
Plumbing connection, drain
1/2 in. FNPT[3]
Accurate?
Plumbing connection, auto refill
3/8 in. OD SS barb[3]
Accurate?
Equipment type
Environmental[5]
Accurate?
Cooling type
Water cooled chiller[5]
Accurate?
Equipment type
Process chiller[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pump TypeCP-55[1]
  • Configuration440-480V[1]
  • Phase3 Phase[1]
  • Power440-480V[1]
  • Cooling capacity at 60 Hz and 20°C15,700 watts[3]
  • Cooling capacity at 50 Hz and 20°C13,030 watts[3]
  • Pump performance at 60 Hz, Pump 123 gpm at 50 psig (TU 9)[3]
  • Pump performance at 60 Hz, Pump 219 gpm at 50 psig (CP 75)[3]
  • Pump performance at 50 Hz, Pump 116 gpm at 50 psig (TU 9)[3]
  • Pump performance at 50 Hz, Pump 210 gpm at 40 psig (CP 75)[3]
  • Power requirements at 60 Hz208-230V 3ø / 460V 3ø[3]
  • Power requirements at 50 Hz380-415V 3ø[3]
  • ApplicationsLasers, process cooling, MRI, medical lasers, linear accelerators, diffusion pumps, vacuum systems, plasma etch equipment[4]
  • Power440-480V, 60Hz, 3 phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What temperature range does the HX 500 support?

The HX 500 supports a temperature range of 5°C to 35°C.[3][4][6]

What is the cooling capacity of the HX 500?

The cooling capacity is 15,700 watts at 60 Hz and 20°C, and 13,030 watts at 50 Hz and 20°C.[3][4]

What pump type is used on the HX 500?

The HX 500 uses a CP-55 pump type.[1][2]

What are the dimensions of the HX 500?

The unit dimensions are 51.625 x 46 x 28.75 inches (131.1 x 116.8 x 73 cm).[3]

Not publicly documented

The following facts about the HX 500 Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HX 500 Chiller are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HX 500 Chiller are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HX 500 Chiller are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HX 500 Chiller are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HX 500 Chiller is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]industrial-stores.com — industrial-stores.comindustrial-stores.com
  4. [4]chillercity.com — chillercity.comchillercity.com
  5. [5]jmind.com — jmind.comjmind.com
  6. [6]Neslab HX500 Chiller – Trillium — trilliumus.comtrilliumus.com
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Last updated Oct 11, 2026.

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