Nikon
1505 G 6 E
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Nikon 1505 G 6 E is a g-line stepper introduced in 1988. The Nikon 1505 G 6 E uses a 5x reduction and has a resolution of 650 nm.[1][2]
Produced
1988–
Optics
5" reticle[3]
What it is
General reference — not yet source-verifiedWhere it fits in the process flow
General reference — not yet source-verifiedThe Nikon 1505 G 6 E sits in the photolithography module after resist coating and before resist development. The tool exposes the resist through a mask so that later process steps can create the intended feature pattern in the resist film.
What do the numbers mean?
Wafer handling3
- Carrier L&R[3]
Optics & imaging8
- 5" reticle[3]
Configuration & options8
- Type 1[3]
Vintage & configurations
- 1988Production start[1]
Introduced in 1988
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- S1818 Positive PhotoresistDocumentutoronto.ca
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What year was the Nikon 1505 G 6 E introduced?
The model was introduced in 1988.[1]
Not publicly documented
The following facts about the 1505 G 6 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 1505 G 6 E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1505 G 6 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1505 G 6 E are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1505 G 6 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1505 G 6 E are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]web.archive.org — nikonprecision.com (Aug 16, 2006)web.archive.org
- [2]ece.utoronto.ca — ece.utoronto.caece.utoronto.ca
- [3]Inventory photo
Last updated Oct 3, 2026.
Compare with similar tools
View all →Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
