Nikon

NSR SF 200

Q: What is the exposure wavelength of the NSR SF 200?

The exposure wavelength is 248 nanometers (KrF).

Q: What is the exposure field size of the NSR SF 200?

The exposure field size is 26 by 33 millimeters.

Nikon NSR family

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NSR SF 200 — Inventory photo — Fig. 01NSR SF 200Inventory photo^[1]

Performance

OF^[1]

Optics

6"^[1]

What it is

The Nikon NSR SF200 is a deep ultraviolet (DUV) lithography tool. The machine is a KrF scan-field stepper operating at a wavelength of 248 nanometers. The NSR SF200 was the first KrF scan-field stepper. The machine uses a reduction ratio of 1/4.^[2]

What do the numbers mean?

Wafer handling7

Wafer Chuck Type: Pin^[1]
Wafer Loader Type: Type 3^[1]
Wafer Carrier Table: Right^[1]
Throughput (300 mm): > 110 wafers/hour^[2]
Throughput (200 mm): > 120 wafers/hour^[2]
Wafer Size (stated by source): 200/300 mm^[2]
Wafer Size (other source): 6 inch^[1]

Optics & imaging12

Reticle Size: 6"^[1]; Reticle Barcode Reader^[1]; Reticle Case Barcode Reader^[1]
Reticle PD/PPD: YEs^[1]
Reticle SMIF: No^[1]
Laser: Gigaphoton G21K2^[1]
Laser Total Shot: 19420.349 Mpls^[1]
Wavelength: 248 nm^[2]
Lens NA: 0.63^[2]
Exposure Area: 26 mm x 33 mm^[2]
Resolution: < 150 nm^[2]
Reticle Size: 6 inch^[1]

Performance2

Pre Alignment 2: OF^[1]
Alignment Sensor: LSA/FIA/LIA^[1]

Control & software2

Mini Computer: Alpha^[1]
Software Version: MCSV: Ver E5.21F Tool^[1]

Configuration & options6

HDD not included^[1]
Chamber Type: Asahi^[1]
Field Size: 26^[1]
RL Linrary: L10+10^[1]
In-Line: Right^[1]
Reduction Ratio: 1/4^[2]

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Not publicly documented

Field notes

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Frequently asked questions

What is the exposure wavelength of the NSR SF 200?

The exposure wavelength is 248 nanometers (KrF).^[2]

What is the exposure field size of the NSR SF 200?

The exposure field size is 26 by 33 millimeters.^[2]

Not publicly documented

The following facts about the NSR SF 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR SF 200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR SF 200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR SF 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR SF 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR SF 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report