Onto Innovation
NSX 115 Auto Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Onto Innovation NSX 115 Auto Defect is a metrology and inspection tool.[1]
How it works
General reference — not yet source-verifiedAn inspection system scans or images wafer surfaces and compares the observed features against expected patterns or reference conditions.
A defect inspection tool isolates particles, pattern irregularities, and other visible anomalies for review or process control.
Where it fits in the process flow
General reference — not yet source-verifiedThe NSX 115 Auto Defect fits into in-line wafer inspection and metrology flows.
The NSX 115 Auto Defect is used before wafers move on to later fabrication steps that benefit from defect screening and process monitoring.
Applications
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What category does the NSX 115 Auto Defect belong to?
The NSX 115 Auto Defect belongs to the metrology and inspection category.[1]
Not publicly documented
The following facts about the NSX 115 Auto Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 115 Auto Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 115 Auto Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 115 Auto Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 115 Auto Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 115 Auto Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Equipment inventory listing
Last updated Oct 8, 2026.
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