Pfeiffer
GSD 320 Mass
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedIn a quadrupole mass spectrometer, ions are separated based on their stability in a radio-frequency electric field applied to four parallel rods. By scanning the RF and DC voltages, ions of different mass-to-charge ratios are sequentially transmitted to a detector. The resulting mass spectrum reveals the composition of the gas sample.
Applications
General reference — not yet source-verifiedResidual gas analysis is a primary application, used in semiconductor manufacturing to monitor vacuum integrity and process gases. Leak detection, thin-film deposition monitoring, and contamination control are common uses. In precision optics, mass spectrometers may monitor coating processes.
What do the numbers mean?
No specifications recorded yet
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Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the GSD 320 Mass are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the GSD 320 Mass are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 320 Mass are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GSD 320 Mass are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GSD 320 Mass are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GSD 320 Mass are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Omni Star Gsd 320 Mass Spectrometer | Pfeiffer Vacuum | Bioz — bioz.combioz.com
Last updated Oct 9, 2026.
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