Waferpedia

Plasma-Therm

Corial 200FA

Plasma-Therm Corial 200FA family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Corial 200FA is a Plasma-Therm Corial brand product. The Corial 200FA is intended for R&D and low-volume production. The Corial 200FA is useful for pilot production and experimentation.[1]

Plasma-ThermCorial 200FA
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What it is

The Plasma-Therm Corial 200FA is a plasma processing system in the Corial brand line. The Corial brand covers R&D and low-volume production tools. The Corial 200FA is among the Corial brand products named for pilot production and experimentation.[1]

Plasma processing equipment is used in semiconductor manufacturing to control the size, shape, and depth of features on silicon wafers. Plasma-Therm is a manufacturer of wafer-based plasma processing equipment with product coverage in etching, deposition, rapid thermal processing, and plasma dicing.[1]

Where it fits in the process flow

The Corial 200FA belongs in the front-end and process-development portion of a fabrication flow where wafer pattern transfer and thin-film process development are performed. The Corial brand is positioned for R&D and low-volume production rather than mass production.[1]

Applications

The Corial 200FA is used for pilot production and experimentation. The Corial brand supports R&D and low-volume production use.[1]

Plasma-Therm serves semiconductor, compound semiconductor, and nanotechnology applications. The company also supports wireless, power device, MEMS, photonics, advanced packaging, and data storage markets.[1]

  • low-volume production
  • pilot production
  • experimentation

What do the numbers mean?

Configuration & options3

Brand
Corial[1]
Accurate?
Product positioning
R&D and low-volume production-focused[1]
Accurate?
Use case
pilot production and experimentation[1]
Accurate?
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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Corial 200FA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Corial 200FA are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Corial 200FA are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Corial 200FA are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Corial 200FA are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Corial 200FA is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]chaindustries.com — chaindustries.comchaindustries.com
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Last updated Oct 2, 2026.

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