Waferpedia

Semics

Opus 3 SLT

Test & ProbeSemics Opus 3 SLT family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Semics Opus 3 SLT is a wafer probe system. The Semics Opus 3 SLT is an automatic tool. The Semics Opus 3 SLT supports 8-inch and 12-inch wafers.[1][2]

Opus 3 SLT — Inventory photo
Fig. 01Opus 3 SLTInventory photo[2]

What it is

General reference — not yet source-verified

A wafer probe system contacts device pads on a wafer with probes so electrical testing can be performed before later packaging steps. A system of this class is used as a wafer-level test platform in semiconductor manufacturing and development.

How it works

General reference — not yet source-verified

A wafer probe system generally moves probes into contact with the wafer pads, measures electrical response, and records device behavior under test conditions. A class like this is commonly arranged around precise wafer positioning, probe alignment, and data acquisition rather than wafer processing or fabrication.

Where it fits in the process flow

General reference — not yet source-verified

A wafer probe system sits in the test flow before wafer singulation and packaging. The Semics Opus 3 SLT is suited to wafer-level electrical verification and characterization on full wafers.

What do the numbers mean?

Wafer handling8

Chuck size
175 x 200 mm[1]
Accurate?
Wafer size
8 inches, 12 inches[1]
Accurate?
Chuck load capacity
200 kg[3]
Accurate?
Type
Automatic Wafer Probe System[1]
Accurate?
Wafer Sizes Supported
8 inches, 12 inches[3]
Accurate?
Chuck Flatness
within 15 µm[3]
Accurate?
Acceptable Wafer Bow
2 mm for 8-inch and 12-inch wafers[3]
Accurate?
Cleaning Modes
CLEAN PAD (100 mm x 200 mm), CLEAN WAFER (8 & 12 inch)[3]
Accurate?

Optics & imaging1

OCR Image Recognition and Auto Needle Alignment
Yes (upward-looking camera, fully automatic)[3]
Accurate?

Performance6

Accuracy
1.5 µm[1]
Accurate?
Test temperature accuracy
±1 °C[3]
Accurate?
System Overall Accuracy
±1.5 µm[3]
Accurate?
System Overall Accuracy (Alternative)
1.5 µm[1]
Accurate?
Temperature Accuracy
±1℃[3]
Accurate?
System Accuracy
±1.5 um[3]
Accurate?

Control & software1

Remote Control
TeamViewer, VNC[3]
Accurate?

Dimensions & facilities1

Overall dimensions
1485 x 1720 x 960 mm[1]
Accurate?

Configuration & options16

Type
Automatic[1]
Accurate?
Operating temperature
-40 to 200 °C[1]
Accurate?
Probing force
230 kgf[1]
Accurate?
Test temperature range
-55 °C to 200 °C[3]
Accurate?
Test Temperature Range (Alternative)
-40 °C to 200 °C[1]
Accurate?
Die Size Range
0.2 mm to 100 mm[3]
Accurate?
MTBF
> 180 hours[3]
Accurate?
GPIB Communication
Yes[3]
Accurate?
Mapping Format Compatibility
TSK, TEL, OPUS[3]
Accurate?
Manufacturer
Semics Inc.[3]
Accurate?
Model
Opus 3 SLT[2]
Accurate?
Operating Temperature
-40 to 200 Degree C[1]
Accurate?
Equipment Name
高低温全自动探针台-Opus 3 SLT[3]
Accurate?
Instrument Number
22007413[3]
Accurate?
Origin
Korea[3]
Accurate?
Temperature Range
-55℃~200℃[3]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Semics Opus 3 SLT support?

The Semics Opus 3 SLT supports 8-inch and 12-inch wafer probing.[3][5][6][1]

Not publicly documented

The following facts about the Opus 3 SLT are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Opus 3 SLT are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Opus 3 SLT are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Opus 3 SLT are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Opus 3 SLT are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Opus 3 SLT is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]semiconductor.directory — semiconductor.directorysemiconductor.directory
  2. [2]Inventory photo
  3. [3]antpedia.com — antpedia.comantpedia.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]高低温全自动探针台-Opus 3 SLT共享 — antpedia.comantpedia.com
  6. [6]高低温全自动探针台Opus3SLT共享 — wiki.antpedia.comwiki.antpedia.com
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Last updated Oct 10, 2026.

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