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Semitool

SST C 742 280 Spray Solvent

Lab & Support EquipmentSemitool SST family
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SST C 742 280 Spray Solvent — Inventory photo
Fig. 01SST C 742 280 Spray SolventInventory photo[1]

Vacuum

DIW Pump[1]

Gas delivery

Chemical Supply Unit[1]

What it is

The Semitool SST C 742 280 Spray Solvent system includes a SMIF loader, a carrier loader, a DIW pump, a chemical supply unit, a CTR unit, a base plate, and cabinets.[1][2]

How it works

The Semitool SST C 742 280 Spray Solvent system is built around a DIW pump and a chemical supply unit for liquid delivery, together with a SMIF loader and carrier loader for wafer transfer.[1][2]

What do the numbers mean?

Vacuum & pumping3

DIW Pump[1]
Accurate?
Included components
SMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets[2]
Accurate?
Vacuum DIW pump
Included[2]
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Wafer handling2

SMIF Loader[1]
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Carrier Loader[1]
Accurate?

Gas & chemistry3

Chemical Supply Unit[1]
Accurate?
System type
Spray Solvent System[2]
Accurate?
Gas delivery chemical supply unit
Included[2]
Accurate?

Configuration & options11

CTR Unit[1]
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Base Plate[1]
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Cabinets[1]
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Make
Semitool[1]
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Model
SST C 742 280[1]
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Description
WET[3]2 sources
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Site size
150mm (6 inch)[3]2 sources
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Serial number
F59353[3]2 sources
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Year of manufacture
1995[3]2 sources
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Condition
IDLE[3]2 sources
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Manufacturer
Semitool[1]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
SST-C-742-280-PB—1995Described as WET; site size 150mm (6 inch); serial number F59353.ptwsingapore.com[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationDIW Pump[1]
  • ConfigurationChemical Supply Unit[1]
  • System typeSpray Solvent System[2]
  • Included componentsSMIF loader, carrier loader, DIW pump, chemical supply unit, CTR unit, base plate, and cabinets[2]
  • Vacuum DIW pumpIncluded[2]
  • Gas delivery chemical supply unitIncluded[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What types of solvents can be used in spray solvent tools of this class?General reference — not yet source-verified

Such systems are compatible with a range of organic solvents and chemical mixtures, including those used for photoresist removal (e.g., acetone, isopropyl alcohol, proprietary strippers) and various cleaning formulations. Material compatibility of the wetted parts should be verified for specific chemicals.

How do such tools ensure uniform processing across the substrate?General reference — not yet source-verified

Uniformity is achieved through a combination of substrate rotation, controlled spray patterns, and process parameters such as nozzle distance and scan motion. Many tools allow recipe programming to optimize these factors for different substrate sizes and geometries.

Can spray solvent tools handle multiple process steps in a single recipe?General reference — not yet source-verified

Yes, many tools in this class support sequential application of different solvents or chemicals, as well as integrated rinse and dry steps, allowing a complete process cycle within the same chamber without manual intervention.

Not publicly documented

The following facts about the SST C 742 280 Spray Solvent are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SST C 742 280 Spray Solvent are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the SST C 742 280 Spray Solvent are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SST C 742 280 Spray Solvent are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SST C 742 280 Spray Solvent is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SST C 742 280 Spray Solvent are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]ptwsingapore.com — ptwsingapore.comptwsingapore.com
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Last updated Oct 10, 2026.

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