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SUSS MicroTec

PA 300 ProbeShield Probing

Test & ProbeSUSS MicroTec PA 300 family
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The SUSS MicroTec PA 300 ProbeShield Probing is a probing station. The SUSS MicroTec PA 300 ProbeShield Probing is configured with a 12-inch nickel plated aluminum chuck. The SUSS MicroTec PA 300 ProbeShield Probing includes an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.[1][2]

PA 300 ProbeShield Probing — Inventory photo
Fig. 01PA 300 ProbeShield ProbingInventory photo[2]

What it is

The SUSS MicroTec PA 300 ProbeShield Probing is a test and probe station for wafer-level electrical probing.[1]

The PA 300 ProbeShield Probing configuration uses a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.[2][1][6]

How it works

The PA 300 ProbeShield Probing includes a microscope, control unit, and micropositioners that support aligned contact to the wafer surface.[2][1]

Where it fits in the process flow

General reference — not yet source-verified

The PA 300 ProbeShield Probing belongs in the test and probe stage of semiconductor work, where devices are electrically contacted before final assembly or release.

Applications

The PA 300 ProbeShield Probing is used for wafer probing and device-level electrical test work.[1][6]

The PA 300 ProbeShield Probing configuration supports visual inspection and manual probe placement through its microscope and micropositioners.[2][1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Error57 No Motor Power (possible defective Motion Drive Board)

What do the numbers mean?

Wafer handling2

12" Nickel Plated Aluminum Chuck[2]
Accurate?
Chuck
12-inch nickel plated aluminum chuck[1]
Accurate?

Optics & imaging2

10X,2X Mitutoyo Plan Apo Objective 2ea[2]
Accurate?
Optics
10X,2X Mitutoyo Plan Apo Objective 2ea[1]
Accurate?

Control & software2

ATT M300 Control Unit[2]
Accurate?
Control unit
ATT M300 Control Unit[1]
Accurate?

Configuration & options7

Velox 2.2.3.23[2]
Accurate?
Cascade CMPS-888 Microscope[2]
Accurate?
Suss PH150 Micropositioner 3ea[2]
Accurate?
Error57 No Motor Power (possible defective Motion Drive Board)[2]
Accurate?
Microscope
Cascade CMPS-888 Microscope[1]
Accurate?
Micropositioners
Suss PH150 Micropositioner 3ea[2]
Accurate?
Failure mode
Error57 No Motor Power (possible defective Motion Drive Board)[1]
Accurate?
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

Criticality:
Critical Spare
High
Medium
Consumable
Availability:In ProductionAftermarket OnlyEOL / NLAScarce
Critical spares advisory

7 parts are EOL or critically scarce: PA 300 Peaking Amplifier; Optional Mounting Kit for Through-Desk Mounting (70-077-02); Extron SYM BNCM Cable (26-533-xx); IEC Power Cord; Rubber Feet (4 pieces); RSB 129 Basic Rack Shelf, 1U 9.5" Deep (60-190-01); RSU 129 Universal Rack Shelf Kit, 1U 9.5" Deep. Source these before taking this tool into production — downtime risk is high.

General
14 tracked parts
1 critical
PA 300 IEC power cord
60-755-01
Aftermarket Only[4]
RSB 129 1U, 9.5" Deep Basic Rack Shelf
60-604-01
Aftermarket Only[4]
RSU 129 1U, 9.5" Deep Universal Rack Shelf Kit
60-190-01
Aftermarket Only[4]
optional mounting kit
70-077-02
Aftermarket Only[4]
Extron SYM BNCM cable
26-533-xx
Aftermarket Only[4]
PA 300 Peaking Amplifier
Main equipment unit
EOL / NLA[5]
Optional Mounting Kit for Through-Desk Mounting
70-077-02
Used for mounting the PA 300 through a desk or table
EOL / NLA[5]
Rubber Feet (4 pieces)
Included with PA 300 for tabletop placement
EOL / NLA[5]
RSB 129 Basic Rack Shelf, 1U 9.5" Deep
60-190-01
Optional accessory for rack mounting
EOL / NLA[5]
RSU 129 Universal Rack Shelf Kit, 1U 9.5" Deep
Optional accessory for rack mounting
EOL / NLA[5]
Rubber Feet (set of 4)
Rubber feet for PA 300 unit
Aftermarket Only[4]
Basic Rack Shelf 1U, 9.5" Deep
60-604-01
Optional rack shelf for mounting PA 300
Aftermarket Only[4]
Universal Rack Shelf Kit 1U, 9.5" Deep
60-190-01
Optional universal rack shelf kit for PA 300
Aftermarket Only[4]
Optional Mounting Kit for Through-Desk Mounting
70-077-02
Used to mount PA 300 through desk or table
Aftermarket Only[4]
Electrical
4 tracked parts
Extron SYM BNCM Cable
26-533-xx
Used to connect source output with 15-pin HD connector to PA 300 BNC input
EOL / NLA[5]
IEC Power Cord
Included with PA 300
EOL / NLA[5]
IEC Power Cord
60-755-01
Replacement power cord for PA 300
Aftermarket Only[4]
Extron SYM BNCM Cable
26-533-xx
Cable to connect 15-pin HD connector source to PA 300 BNC input
Aftermarket Only[4]
Scheduled ConsumablesReplace at PM intervals
RSU 129 1U, 9.5" Deep Universal Rack Shelf Kit
60-190-01
optional mounting kit
70-077-02
Extron SYM BNCM Cable
26-533-xx
IEC Power Cord
Rubber Feet (4 pieces)
Rubber Feet (set of 4)
Universal Rack Shelf Kit 1U, 9.5" Deep
60-190-01
Optional Mounting Kit for Through-Desk Mounting
70-077-02
Extron SYM BNCM Cable
26-533-xx

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What type of equipment is the PA 300 ProbeShield Probing?

The PA 300 ProbeShield Probing is a test and probe station for wafer-level electrical probing.[1]

What major components are part of the PA 300 ProbeShield Probing configuration?

The PA 300 ProbeShield Probing configuration includes a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.[2][1][6]

What chuck size does the PA 300 ProbeShield Probing use?

The PA 300 ProbeShield Probing uses a 12-inch nickel plated aluminum chuck.[2][1][6]

What microscope is used with the PA 300 ProbeShield Probing?

The PA 300 ProbeShield Probing uses a Cascade CMPS-888 microscope.[2][1][6]

Not publicly documented

The following facts about the PA 300 ProbeShield Probing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PA 300 ProbeShield Probing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PA 300 ProbeShield Probing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PA 300 ProbeShield Probing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the PA 300 ProbeShield Probing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the PA 300 ProbeShield Probing are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]manualslib.commanualslib.com
  5. [5]manualslib.commanualslib.com
  6. [6]SUSS MicroTec PA 300 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 6, 2026.

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