SVG
8836 HPO Photoresist
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SVG 8836 HPO is a dual-track photoresist coater and developer from the SVG 8800 series. The SVG 8836 HPO processes wafers through a sequence of send, prime, chill, coat, bake, and receive steps for coating, and a similar sequence for developing. The SVG 8836 HPO supports 6-inch and 8-inch wafers.[1]
How it works
The SVG 8836 HPO uses process sequences that include send, prime, chill, coat, bake, and receive. The SVG 8836 HPO also uses a send, bake, chill, develop, bake, and receive sequence.[1]
Applications
The SVG 8836 HPO is used for photoresist processing in semiconductor manufacturing. The SVG 8836 HPO is applied to wafer coating and developer operations.[2][1]
What do the numbers mean?
Wafer handling1
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is the SVG 8836 HPO a single-track or dual-track system?
The SVG 8836 HPO is a dual-track coater and developer system.[1]
Not publicly documented
The following facts about the 8836 HPO Photoresist are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8836 HPO Photoresist are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 8836 HPO Photoresist are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 8836 HPO Photoresist are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 8836 HPO Photoresist are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 8836 HPO Photoresist is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [2]Inventory photo
Last updated Oct 3, 2026.
Compare with similar tools
View all →The ABM-407B-2-S-CE-S293 is a robot.