Tegal
1512e
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tegal 1512e is an industrial RIE plasma etcher system. The Tegal 1512e is configured with modules assembly for CI-4222.[1]
What it is
General reference — not yet source-verifiedThe Tegal 1512e is a plasma etcher used in semiconductor manufacturing.
How it works
General reference — not yet source-verifiedPlasma etchers generate a low-pressure, radio-frequency (RF) excited gas plasma inside a reaction chamber to etch thin films from a semiconductor wafer.
The process uses chemically reactive radicals and energetic ions from the plasma to remove material selectively from the wafer surface, typically through a patterned mask.
Applications
General reference — not yet source-verifiedApplications include contact hole etching, via formation, pad etching, and other critical pattern-transfer steps in mature semiconductor technologies.
What do the numbers mean?
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 1512e are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 1512e are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1512e are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 1512e are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1512e are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1512e are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]semistarcorp.com — semistarcorp.comsemistarcorp.com
Last updated Oct 3, 2026.
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