Waferpedia

Temescal

CV-6S

Deposition4"Temescal CV-6S family
Research Quality: 40% complete
CV-6S — web.archive.org
Fig. 01CV-6Sweb.archive.org[1]

Wafer size

4"

Power

10 kV[2]

Vacuum

~ 5e-7 ultimate base pressure[2]

What is it?

The sources describe the Temescal CV-6S in a vacuum deposition context as an electron-beam evaporation system. It is shown as a load-locked metal evaporator with dual gun capability, and the detailed specifications list a 10 kV power supply, two Temescal 4-pocket series 260 e-beam sources, cryo-pumped operation, load-lock, automatic vacuum sequencing, a Super Sweep e-beam sweep controller, and an Inficon IC/5 thickness monitor. The UCSB source states sample size as one wafer up to 4 inches in diameter and notes use for metal deposition applications including contacts and bond pads.

What can it run?

Process applications and technology nodes documented for this tool.

  • Metal deposition
  • N-type ohmic contact metalization to compound semiconductors
  • Schottky contacts to semiconductors
  • Bond pads
  • Other general metalizations

What do the numbers mean?

Power & electrical4

Power supply
10 kV[2]
Accurate?
Power supply type
Constant voltage, 6 kW high frequency switching power supply[1]
Accurate?
Voltage/current regulation
+/- 0.5%[1]
Accurate?
Included components
Power module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual[1]
Accurate?

Vacuum & pumping3

Base pressure
~ 5e-7 ultimate base pressure[2]
Accurate?
Vacuum system
Cryo-pumped system[2]
Accurate?
Vacuum sequencing
Automatic vacuum sequencing[2]
Accurate?

Wafer handling2

Description
Load Locked Metal Evaporator Dual Gun[2]
Accurate?
Sample size
1 wafer up to 4" diameter[2]
Accurate?

Optics & imaging1

Operating capability
Designed to power and control one or two electron beam sources simultaneously[1]
Accurate?

Control & software1

Beam sweep control
Temescal Super Sweep e-beam sweep control[2]
Accurate?

Configuration & options7

Manufacturer
Temescal[2]
Accurate?
Model
CV-6S[2]
Accurate?
E-beam sources
2 Temescal 4-pocket series 260 e-beam sources[2]
Accurate?
Load-lock
Present for quick turn-around[2]
Accurate?
Thickness monitoring
Inficon IC/5 programmable crystal thickness monitoring system[2]
Accurate?
Metals, front gun
Ti, Pt, Ni, Au[2]
Accurate?
Metals, rear gun
Pd, Al, Ag, Ge[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
CV-6S——Base model documented as a 6 kW electron beam power supply; sources also list 208 V, 240 V, 380 V, 415 V, and 480 V input versions.web.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power supply10 kV[2]
  • Base pressure~ 5e-7 ultimate base pressure[2]
  • Vacuum systemCryo-pumped system[2]
  • Vacuum sequencingAutomatic vacuum sequencing[2]
  • Power supply typeConstant voltage, 6 kW high frequency switching power supply[1]
  • Voltage/current regulation+/- 0.5%[1]
  • Included componentsPower module, high-voltage/gun control unit, filament transformer, 20 ft. cable set, operator manual[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the CV-6S are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CV-6S are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the CV-6S are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the CV-6S are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the CV-6S is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the CV-6S are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
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Last updated Jul 29, 2026.

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