Thermo Fisher
Scientific FEI Quanta 3 D FEG Dual Beam
The Thermo Fisher Scientific / FEI Quanta 3 D FEG Dual Beam is a dual-beam system with a field emission gun manufactured in 2009. The Thermo Fisher Scientific / FEI Quanta 3 D FEG Dual Beam includes a STEM detector, GSED detector, and a gas injection system.[1]
Plate 01Laoding a sample in FEI Quanta 3D FEG Dual Beam Electron Microscope
Cmsc PolymerWatch on YouTubePlate 02Capturing the first image in FEI Quanta 3D FEG Dual Beam Electron Microscope
Cmsc PolymerWatch on YouTube
What it is
The Thermo Fisher Scientific FEI Quanta 3 D FEG (also marketed as the FEI Quanta 3 D FEG) is a dual-beam system. The system combines a field emission gun scanning electron microscope (SEM) column with a focused ion beam (FIB) column.[2][1]
What do the numbers mean?
Optics & imaging5
- STEM detector[2]
- Detector Amplifier[2]
- GSED detector[2]
- Built-n Optical High Speed Beam Blanker[2]
- Included Components
- STEM detector, Detector Amplifier, GSED detector, built-in optical high speed beam blanker, Scanservice Blanking Electronics, NPGS USB Enable Switch, NPGS Blanker Relay Box, at least one GIS Unit, spare parts including ion extractor, suppressor, new DGBS board, chiller[1]
Configuration & options9
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the Scientific FEI Quanta 3 D FEG Dual Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Quanta 3 D FEG Dual Beam are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Quanta 3 D FEG Dual Beam are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Quanta 3 D FEG Dual Beam are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Quanta 3 D FEG Dual Beam are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Quanta 3 D FEG Dual Beam is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
Last updated Sep 22, 2026.
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