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Thermo Fisher

Scientific FEI Titan 80 300 TEM

The Scientific FEI Titan 80 300 TEM is a transmission electron microscope. The Titan 80 300 TEM uses a Schottky field emission gun as its electron source. The Titan 80 300 TEM includes a Cs (spherical aberration) image corrector to improve resolution.[1][2]

Scientific FEI Titan 80 300 TEM — Inventory photo
Fig. 01Scientific FEI Titan 80 300 TEMInventory photo[1]

Power

Alignments at 80kV and 300kV[1]

Performance

Alignments at 80kV and 300kV[1]

Optics

3-Condenser Lens System[1]

What it is

The Thermo Fisher Scientific FEI Titan 80 300 TEM is a transmission electron microscope equipped with a Schottky field emission gun, a three-condenser lens system, and a Cs image corrector with its own personal computer and power supply unit.[1][2]

The Titan 80 300 TEM includes a Bruker XFlash EDX detector with a standalone workstation, a Gatan Tridiem GIF for EELS and EFTEM, a Gatan DigiScan, a Gatan ADF/BF STEM detector, and a Fischione HAADF detector.[1][2]

The instrument is fitted with a US1000 bottom-mount CCD camera, a Lorentz lens for Lorentz TEM imaging, and an AAS at the C2 and objective aperture positions, along with manual apertures at the SA, C3, and C1 positions.[1][2]

How it works

The Titan 80 300 TEM can operate in bright-field, dark-field, and scanning TEM (STEM) modes using the Gatan ADF/BF STEM detector and the Fischione HAADF detector, and it supports electron energy-loss spectroscopy and energy-filtered TEM via the Gatan Tridiem GIF.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

Transmission electron microscopes are used in semiconductor manufacturing for metrology, defect analysis, and process development, typically in a failure-analysis laboratory or a research environment rather than on the production line.

Applications

The Titan 80 300 TEM is employed for high-resolution transmission electron microscopy, scanning TEM, electron diffraction, and tomography, as enabled by its dedicated tomography software and free lens control software.[1][2]

Elemental analysis is performed with the Bruker XFlash EDX detector, and the Gatan Tridiem GIF provides electron energy-loss spectroscopy and energy-filtered TEM capabilities.[1][2]

What do the numbers mean?

Power & electrical3

Cs image corrector with image corrector PC and power supply unit[1]
Accurate?
Image corrector
Cs image corrector with image corrector PC and power supply unit[1]
Accurate?
Alignment voltages
Alignments at 80kV and 300kV[1]
Accurate?

Optics & imaging16

3-Condenser Lens System[1]
Accurate?
Bruker XFlash EDX Detector 6T – 100RT with a standalone workstation[1]
Accurate?
Gatan ADF/BF STEM detector[1]
Accurate?
Fischione HAADF detector[1]
Accurate?
US1000 Bottom mount CCD camera[1]
Accurate?
Lorentz Lens for Lorentz TEM imaging[1]
Accurate?
AAS at the C2 and objective aperture positions[1]
Accurate?
Free lens control software[1]
Accurate?
Condenser lens system
3-Condenser Lens System[1]
Accurate?
EDX detector
Bruker XFlash EDX Detector 6T – 100RT with a standalone workstation[1]
Accurate?
STEM detector (bright field / dark field)
Gatan ADF/BF STEM detector[1]
Accurate?
HAADF detector
Fischione HAADF detector[1]
Accurate?
CCD camera
US1000 Bottom mount CCD camera[1]
Accurate?
Lorentz lens
Lorentz Lens for Lorentz TEM imaging[1]
Accurate?
Aperture alignment system
AAS at the C2 and objective aperture positions[1]
Accurate?
Lens control software
Free lens control software[1]
Accurate?

Performance1

Alignments at 80kV and 300kV[1]
Accurate?

Control & software8

TrueImage software[1]
Accurate?
Gatan DigitalMicrograph software[1]
Accurate?
FEI TIA software[1]
Accurate?
Tomography software[1]
Accurate?
Imaging software
TrueImage software[1]
Accurate?
STEM software
Gatan DigitalMicrograph software[1]
Accurate?
TEM imaging software
FEI TIA software[1]
Accurate?
Tomography software
Tomography software[1]
Accurate?

Configuration & options12

Schottky FEG[1]
Accurate?
Gatan Tridiem GIF capable of EELS and EFTEM[1]
Accurate?
Gatan DigiScan[1]
Accurate?
Manual apertures at SA, C3, and C1 aperture positions[1]
Accurate?
Haskris Chiller Model R175EW[1]
Accurate?
Toshiba UPS 4200FA with a Power Battery Company UPS battery supply[1]
Accurate?
Electron source
Schottky FEG[1]
Accurate?
Energy filter / EELS
Gatan Tridiem GIF capable of EELS and EFTEM[1]
Accurate?
STEM scanning
Gatan DigiScan[1]
Accurate?
Manual apertures
Manual apertures at SA, C3, and C1 aperture positions[1]
Accurate?
Chiller
Haskris Chiller Model R175EW[1]
Accurate?
UPS
Toshiba UPS 4200FA with a Power Battery Company UPS battery supply[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationCs image corrector with image corrector PC and power supply unit[1]
  • Image correctorCs image corrector with image corrector PC and power supply unit[1]
  • Alignment voltagesAlignments at 80kV and 300kV[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Scientific FEI Titan 80 300 TEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Titan 80 300 TEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Titan 80 300 TEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Scientific FEI Titan 80 300 TEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Scientific FEI Titan 80 300 TEM are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Scientific FEI Titan 80 300 TEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Scientific FEI Titan 80 300 TEM — Thermo Fisher | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Sep 24, 2026.

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