Waferpedia

Tokyo Electron

Alpha 8 SE

Thermal / DiffusionWafer I Cassette HandlingProduced 2003–Tokyo Electron Alpha family
Research Quality: 60% complete
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The Tel Alpha 8 SE is an 8-inch thermal/diffusion furnace. The Alpha 8 SE supports processes including high-temperature oxide, undoped poly, and D-poly. The Alpha 8 SE operates on 100 V AC power with a maximum full-load current of 40 A.[1][2][3][4]

Alpha 8 SE — Inventory photo
Fig. 01Alpha 8 SEInventory photo[1]

Wafer size

Wafer I Cassette Handling

Produced

2003–

Power

50/60 HZ[1]

Vacuum

Atmospheric

Gas delivery

WAVES

What it is

General reference — not yet source-verified

The Tokyo Electron Alpha 8 SE is a thermal processing furnace used in semiconductor manufacturing.

How it works

General reference — not yet source-verified

A thermal diffusion furnace exposes wafers to a controlled heated process environment so dopants or film growth reactions can proceed across the wafer surface.

Where it fits in the process flow

General reference — not yet source-verified

A diffusion furnace sits in the wafer fabrication flow during high temperature thermal steps that follow earlier surface preparation and precede later patterning or integration steps.

Applications

General reference — not yet source-verified

A thermal diffusion furnace is used for oxidation and polysilicon related thermal steps in semiconductor manufacturing.

  • High temperature oxide
  • Undoped poly
  • D-Poly

What do the numbers mean?

Power & electrical7

50/60 HZ[1]
Accurate?
Single Phase[1]
Accurate?
Power AC
100 V[1]
Accurate?
Voltage
208 V[5]
Accurate?
Phase
3 Phase[5]
Accurate?
Frequency
50/60 HZ[1]
Accurate?
Phase
Single Phase[1]
Accurate?

Vacuum & pumping1

Process Pressure
Atmospheric(inventory listing)
Accurate?

Wafer handling10

Handler System
Wafer Transfer Robot[5]
Accurate?
N2 Load Lock
Not Installed(inventory listing)
Accurate?
Wafer size
Wafer I Cassette Handling(inventory listing)
Accurate?
Wafer Size
8 inch[2]
Accurate?
Wafer Size
26 slots(inventory listing)
Accurate?
Wafer Type
Notch(inventory listing)
Accurate?
Stocker
21 slot Carrier(inventory listing)
Accurate?
Wafer size
Transfer Stage Wafer Position Sensor(inventory listing)
Accurate?
Wafer size
Fork Wafer Present Sensor(inventory listing)
Accurate?
Wafer size
Fork Wafer Position Sensor OEM Model Description(inventory listing)
Accurate?

Gas & chemistry2

Gas Controller
WAVES(inventory listing)
Accurate?
Gas Flow Chart Panel
Installed (Front, Rear)(inventory listing)
Accurate?

Optics & imaging1

Furnace Overtemp Detector
FENWAL/DMR-5FR(inventory listing)
Accurate?

Control & software9

Software Version
3.01 Rev. 003[5]
Accurate?
Factory Interface
SMIF[5]
Accurate?
Software Version
3.01 Rev. 004[8]
Accurate?
System Main Controller
WAVES(inventory listing)
Accurate?
Mechanical Controller
WAVES(inventory listing)
Accurate?
Sequenc Controller
WAVES(inventory listing)
Accurate?
Furnace Temperature Controller
Model 560A(inventory listing)
Accurate?
Software Version
V07.06(inventory listing)
Accurate?
System Controller
TS-4000Z(inventory listing)
Accurate?

Configuration & options47

Process
High Temp Oxide (HCL, Ar)[1]
Accurate?
Power
4.0 kVA[1]
Accurate?
Maximum Full Load Current
40 A[1]
Accurate?
Overcurrent / Shortcircuit
40 A[1]
Accurate?
UnDoped Poly[2]
Accurate?
High Temperature Oxide[3]
Accurate?
Process
D-Poly[6]
Accurate?
Process
Undoped Poly[4]
Accurate?
Process
Hi Temp Oxide, Condition 'A'[7]
Accurate?
Main System
Well Drive[5]
Accurate?
Oxide process[5]
Accurate?
System Layout
Main, Utility(inventory listing)
Accurate?
System Type
L Type(inventory listing)
Accurate?
Side Maintenance
Installed(inventory listing)
Accurate?
System Paint Color
Ivory(inventory listing)
Accurate?
Furnace Front Surface Finish
Ivory(inventory listing)
Accurate?
Heater Model
VMU-40-007EX(1200°C)(inventory listing)
Accurate?
Rapid Cooling Unit
Not Installed(inventory listing)
Accurate?
O2 Analyzer
Not Installed(inventory listing)
Accurate?
SMIF Maker/Model
Not Installed(inventory listing)
Accurate?
AGV Compatibility
Unable(inventory listing)
Accurate?
Operation Panel
Installed (Front, Rear)(inventory listing)
Accurate?
Signal Tower / Colors
Installed (3 COLORS)(inventory listing)
Accurate?
Vintage
2006(inventory listing)
Accurate?
Vintage
2003(inventory listing)
Accurate?
Power Consumption
4.0 kVA[1]
Accurate?
Vintage
2002(inventory listing)
Accurate?
Vintage
2004(inventory listing)
Accurate?
Vintage
2000(inventory listing)
Accurate?
Vintage
2001(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2006(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2003(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2002(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2004(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2000(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
2001(inventory listing)
Accurate?
Process
Oxide(inventory listing)
Accurate?
Temperature Range
960°C (max. 1025°C)(inventory listing)
Accurate?
Front Surface Finish
White(inventory listing)
Accurate?
Inner TC Type
In-line(inventory listing)
Accurate?
Tube Seal
Lip Seal(inventory listing)
Accurate?
Vintage
1997(inventory listing)
Accurate?
Furnaces / Diffusion Vintage
1997(inventory listing)
Accurate?
Model
Alpha 8 SE[1]
Accurate?
Make
Tel[1]
Accurate?
Equipment type
Furnace[2]
Accurate?
Process
High Temperature Oxide[3]
Accurate?

Vintage & configurations

  1. 2003Production start[4]

    Vintage 2003 stated for an Alpha 8 SE furnace unit with undoped poly process.

  2. 2004Production start[1]

    Vintage 2004 stated for an Alpha 8 SE unit with high-temperature oxide process and for a D-poly process unit.

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 HZ[1]
  • ConfigurationSingle Phase[1]
  • Power AC100 V[1]
  • Voltage208 V[5]
  • Phase3 Phase[5]
  • Gas ControllerWAVES
  • Gas Flow Chart PanelInstalled (Front, Rear)
  • Frequency50/60 HZ[1]
  • PhaseSingle Phase[1]
  • Process PressureAtmospheric

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What thermal processes can the Alpha 8 SE perform?

The Alpha 8 SE can perform high-temperature oxide processing (with HCL and argon), as well as depositing undoped and doped polysilicon.[1][2][3][6][4]

What is the electrical power requirement for the Alpha 8 SE?

The Alpha 8 SE requires a single-phase AC power of 100 V, with a maximum full load current of 40 A and a total power consumption of 4.0 kVA.[1]

Not publicly documented

The following facts about the Alpha 8 SE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the Alpha 8 SE are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alpha 8 SE are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alpha 8 SE are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alpha 8 SE is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Alpha 8 SE are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (9)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]Inventory photo
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]ALPHA-303i | Tokyo Electron — tel.com (Mar 12, 2008)web.archive.org
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Last updated Oct 6, 2026.

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