Tokyo Electron
Telindy Plus I M 1
Wafer size
125 Wafer Load Size
Power
50/60 Hz[1]
What it is
The Tel Telindy Plus I M 1 is an atomic layer deposition furnace used for semiconductor processing.[1]
The Tel Telindy Plus I M 1 is a deposition tool with a 125 wafer load size, a dual boat system option, and 400 VAC three phase power at 50/60 Hz.[1]
How it works
General reference — not yet source-verifiedAtomic layer deposition builds thin films by exposing a substrate to alternating precursor reactions that add material in controlled surface-limited steps.
A furnace configuration provides a heated process environment for batch handling of wafers during deposition.
Where it fits in the process flow
General reference — not yet source-verifiedThe Tel Telindy Plus I M 1 belongs in the thin-film deposition stage of semiconductor fabrication.
The Tel Telindy Plus I M 1 is used after earlier wafer preparation steps and before later patterning or integration steps that rely on the deposited film.
Applications
General reference — not yet source-verifiedThe Tel Telindy Plus I M 1 is used for depositing thin films in semiconductor manufacturing.
Atomic layer deposition is used when precise thickness control and conformal coverage are needed on structured surfaces.
What do the numbers mean?
Power & electrical3
- 50/60 Hz[1]
Wafer handling2
Configuration & options5
- Dual Boat System Option[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Tel Telindy Plus I M 1?
The Tel Telindy Plus I M 1 is an atomic layer deposition furnace.[1]
What is the wafer load size?
The wafer load size is 125 wafers.[1]
Does the Tel Telindy Plus I M 1 have a dual boat option?
The Tel Telindy Plus I M 1 has a dual boat system option.[1]
Not publicly documented
The following facts about the Telindy Plus I M 1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Telindy Plus I M 1 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Telindy Plus I M 1 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Telindy Plus I M 1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Telindy Plus I M 1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Telindy Plus I M 1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Oct 4, 2026.
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